Browse > Article
http://dx.doi.org/10.3807/KJOP.2013.24.2.092

Expressions for Ellipsometric Constants of Samples Covered with Two Thick Incoherent Films  

Kim, Sang Youl (Department of Physics, Ajou University)
Publication Information
Korean Journal of Optics and Photonics / v.24, no.2, 2013 , pp. 92-98 More about this Journal
Abstract
The expressions for ellipsometric constants of a sample covered with two thick films are derived, where incoherent superposition of multiply reflected lights inside thick films is properly considered in the frame of the rotating analyzer ellipsometry. The derived expressions are successfully applied to the analysis of a silicon wafer with a thin silicon dioxide film on it, which is placed beneath a cover glass and an air gap.
Keywords
Incoherent layers; Thick films; Ellipsometry;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 S.-H. Kim, W. Chegal, J. Doh, H. M. Cho, and D. W. Moon, "Study of cell-matrix adhesion dynamics using surface plasmon resonance imaging ellipsometry," Biophysical Journal 100, 1819-1828 (2011).   DOI   ScienceOn
2 B. Harbecke, "Coherent and incoherent reflection and transmission of multilayer structures," Appl. Phys. B 39, 165-170 (1986).   DOI
3 R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, Netherlands, 1987).
4 S. Y. Kim, Ellipsometry (Ajou University Press, Gyeonggi, Korea, 2000), Chapter 3-4.
5 C. C. Katsides and D. I. Siapkas, "General transfer-matrix method for optical multilayer systems with coherent, partially coherent, and incoherent interference," Appl. Opt. 41, 3978(2002).   DOI
6 Y. H. Yang and J. R. Abelson, "Spectroscopic ellipsometry of thin films on transparent substrate: a formalism for data interpretation," J. Vac. Sci. Technol. A13, 1145 (1995).   DOI   ScienceOn
7 M. Kildemo, R. Ossikovski, and M. Stchakovsky, "Measurement of the absorption edge of thick transparent substrate using the incoherent reflection model and spectroscopic UV-visiblenear IR ellipsometry," Thin Solid Films 313-314, 108-113(1988).
8 K. Forcht, A. Gombert, R. Joerger, and M. Kohl, "Incoherent superposition in ellipsometric measurement," Thin Solid Films 302, 43-50 (1997).   DOI   ScienceOn
9 H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (John Wiley & Sons, Ibaraki, Japan, 2007), Chapter 5.
10 Y. J. Seo, S. U. Park, S. M. Yang, and S. Y. Kim, "Analysis of the spectro-ellipsometric data with backside reflection from semi-transparent substrate by using a rotating polarizer ellipsometer," Korean J. Opt. Photon. (Hankook Kwanghak Hoeji) 22, 170-178 (2011).   과학기술학회마을   DOI   ScienceOn
11 http:\\sjbyrnes.com/fresnel_manual.pdf.
12 http://www.ellipsotech.com/AT_Semiconductor.html#1.
13 G. Jin, Z. H. Wang, Y. H. Meng, and Z. Y. Zhao, "Imaging ellipsometry for the visualization of bio-molecular layers," Engineering in Medicine and Biology Society, Proc. The 20th Annual International Conference of the IEEE 20, 581-584 (1998).
14 R. Seitz, R. Brings, and R. Geiger, "Protein adsorption on solid-liquid interfaces monitored by laser-ellipsometry," Applied Surface Science 252, 154-157 (2005).   DOI   ScienceOn
15 M. Poksinski and H. Arwin, "Protein monolayers monitored by internal reflection ellipsometry," The 3rd International Conference on Spectroscopic Ellipsometry 455-456, 716-721(2004).
16 J. K. Choi, W. Y. Shim, G. Lee, S. Y. Kim, S. U. Park, W. Chegal, Y. J. Cho, and H. M. Cho, "Study on refractive index and thickness of human stem cells by using imaging ellipsometry," Korean J. Opt. Photon. (Hankook Kwanghak Hoeji) 20, 53-56 (2009).   과학기술학회마을   DOI   ScienceOn