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http://dx.doi.org/10.3807/HKH.2008.19.5.376

3D Precision Measurement of Scanning Moire Using Line Scan Camera  

Kim, Hyun-Ju (School of Information and Communication Engineering, Inha University)
Yoon, Doo-Hyun (School of Information and Communication Engineering, Inha University)
Kim, Hak-Il (School of Information and Communication Engineering, Inha University)
Publication Information
Korean Journal of Optics and Photonics / v.19, no.5, 2008 , pp. 376-380 More about this Journal
Abstract
This paper presents the Projection Moire method using a line scan camera. The high resolution feature of a line scan camera makes it possible to scan an image quickly, thus enabling a much quicker 3D profile. This method uses a high resolution line scan camera making it possible to scan an image at high speed simultaneously measuring the 3D profile of a large FOV. When using a high resolution scan camera, a full FOV is scanned, thus requiring just one movement of a projection grating. As a result, the number of grating movements is reduced drastically. The end result is a faster and more accurate 3D measurement. Moving the grating too quickly causes vibration in the imaging system, which will normally be required to apply a stitching technique when using an area scan camera. However the technique is not required when using a line scan camera. Compared with the previous techniques, it has the advantages of simple hardware without moving mechanical parts - single exposure for obtaining three-dimensional information. A method using a high resolution line scan camera can be used in mass production to measure the bump height of wafers or the bump height of package substrates.
Keywords
Moire; Line scan camera; Height measurement;
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  • Reference
1 J. Paakkari, "On-line flatness measurement of large steel plates using Moire topography," Dissertation for the degree of Doctor, Technical research centre of Finland ESPOO, 1998
2 K. Creath, "Phase-measurement Interferometry techniques," Progress in optics, vol. 26, pp. 349-398, 1988   DOI
3 Daniel Malacara, Manuel Servin, and Zacaias Malacara, Interferogram Analysis for Optical Testing: second edition (Taylor & Francis, New York, US, 2005), pp. 274-278
4 Takeda, "Fringe formula for projection type Moire topography," Optics and Lasers in Engineering, vol. 3, no. 1, pp. 45-52, 1982   DOI   ScienceOn
5 H. Takasaki, "Moire Topography," Applied Optics, vol. 9, no. 6, pp. 1467-1472, 1970   DOI
6 Eugene Hecht, OPTICS: fourth edition (Addition Wesley, New York, US, 2002), pp. 385-438
7 Masanori Idesawa, Toyohiko Yatagai, and Takashi Soma, "Scanning Moiré method and automatic measurement of 3-D shapes," Applied Optics, vol. 16, no. 8, pp. 2152-2162, Aug. 1977   DOI
8 M. Halioua, R. S. Krishnamurthy, H. Liu, and F. P. Chiang, "Projection Moire with moving gratings for automated 3-D topography," Applied Optics, vol. 22, no. 6, pp. 850-855, March 1983   DOI
9 Tetsuya Matsumoto, Yoichi Kitagawa, Masaaki Adachi, and Akigiro Hayashi, "Moire topography for threedimensional profile measurement using the interference fringes of a laser," Optical Engineering, vol. 31, no. 12, pp. 2668-2673, Dec. 1992   DOI
10 김승우, 최이배, 오정택, 정문식, "위상천이격자를 이용한 영사식 모아레", 한국기계학회 논문집 A권, 22권, 5호, pp. 850-857, 1998