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http://dx.doi.org/10.3807/HKH.2007.18.1.037

MTF Measuring Equipment of Optical System for LCD Substrate Inspection  

Hong, Sung-Mok (Dept. of Applied Optics and Electromagnetics, Hannam University)
Kim, Hee-Nam (Dept. of Applied Optics and Electromagnetics, Hannam University)
Jo, Jae-Heung (Dept. of Applied Optics and Electromagnetics, Hannam University)
Lee, Yun-Woo (Space Optical Research Center, Korea Research Institute of Standards and Science)
Lee, Hoi-Youn (Space Optical Research Center, Korea Research Institute of Standards and Science)
Yang, Ho-Soon (Space Optical Research Center, Korea Research Institute of Standards and Science)
Lee, In-Won (Space Optical Research Center, Korea Research Institute of Standards and Science)
Jung, Jin-Ho (PRO OPTICS)
Publication Information
Korean Journal of Optics and Photonics / v.18, no.1, 2007 , pp. 37-43 More about this Journal
Abstract
We developed the equipment to measure the MTF(modulation transfer function) of an optical system for automatically inspecting the surface condition of an LCD substrate. We have made an object generator with USAF(United States Air Force) targets of three bar patterns and an integrating sphere, and an image analyzer with a 2 dimensional CCD(charge coupled device) and a relay lens. The MTF of the lens under test was obtained by correcting the measured CTF(contrast transfer function) which is the ratio of the contrast in the image of the USAF target to the contrast in the object. We have measured an optical system of F/13.65 (2.6x), the MTF are 30.6 % tangential plane and 26.1 % sagittal plane at 62.5 1p/mm.
Keywords
CTF; MTF; USAF target;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
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