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http://dx.doi.org/10.3807/KJOP.2006.17.2.149

Tolerance analysis of Multi-Configurative Microscopic System for Inspecting the Wire-Bonding Status of Semiconductor Chips  

Ryu, Jae-Myung (Optics & Digital Imaging Division, Samsung Techwin Co., LTD)
Kim, Jae-Bum (Optics & Digital Imaging Division, Samsung Techwin Co., LTD)
Kang, Geon-Mo (Optics & Digital Imaging Division, Samsung Techwin Co., LTD)
Jung, Jin-Ho (R&D center, Prooptics.)
Baek, Seung-Sun (Dept. of Ocular Optics, Daejeon Health Sciences College2 dong)
Jo, Jae-Heung (Dept. of Applied Optics and Electromagnetics, Hannam University)
Publication Information
Korean Journal of Optics and Photonics / v.17, no.2, 2006 , pp. 149-158 More about this Journal
Abstract
We have analyzed various tolerances of the multi-configurative microscopic system for inspecting the wire-bonding of a reed frame by using the Gaussian bracket method and the equivalent lens method. The tolerances for the curvature and the thickness, which are axial symmetric tolerances, are given by varying the back focal length within a fecal depth under diffraction-limited conditions. Moreover, by using the trial and error method, the axial non-symmetric tolerances for decenter and tilt are established by assigning the 5% variation of MTF(modulation transfer function) at the spatial frequency of 50 lp/mm and at the field angle of 0.7 field. As the tolerances with the most probable distribution are distributed within the range of the decay rate of less than 5% independent of the probability distribution of tolerances, we can achieve completely the desired design performances of the multi-configurative microscopic system by using the various ranges of these tolerances.
Keywords
Geometrical optics; Lens design; Multi-configurative microscopic system; Illumination system; Tolerance calculation;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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