Electro-optical analysis of a miniaturized electrostatic electron lens |
Kim, Ho-Seob
(Dept. of Physics and Advanced Material Science, and Center for Next Generation Semiconductor Technology, Sun Moon University)
Kim, Dae-Wook (Dept. of Physics and Advanced Material Science, and Center for Next Generation Semiconductor Technology, Sun Moon University) Kim, Young-Chul (Dept. of Physics and Advanced Material Science, and Center for Next Generation Semiconductor Technology, Sun Moon University) Choi, Sang-Kuk (ETRI) Kim, Dae-Yong (ETRI) |
1 | E. Kratschmer, H. S. Kim, M. G. R. Thomson, K. Y. Lee, S. A. Rishton, M. L. Yu, and T. H. P. Chang, 'Sub-40 nm resolution 1 keV scanning tunneling microscope field-emission microcolumn,' J. Vac. Sci. Technol. B vol. 12, no. 6, pp. 3503-3507, 1994 DOI |
2 | Miroslav Sedlacek, Electron Physics of Vacuum and Gaseous Devices (JOHN WILEY & SONS, INC., New York, USA, 1996), Chapter 4 |
3 | P. W. Hawkers and E. Kasper, Principles of Electron Optics (ACADEMIC PRESS, San Diego, USA, 1989), Vol. 1,2 |
4 | H. S. Kim, M. L. Yu, U. Staufer, L. P. Muray, D. P. Kern, and T. H. P. Chang, 'Oxygen processed field emission tips for microcolurnn applications,' J. Vac. Sci. Technol. B Vol. 11, no. 6, pp. 2327-2331,1993 DOI ScienceOn |
5 | M. L. Yu, B. W. Hussey, H. S. Kim, and T. H. P. Chang, 'Emission characteristics of ultrasharp cold field emitters,' J. Vac. Sci. Technol. B vol. 12, no. 6, pp. 3431-3435, 1994 DOI |
6 | E. Kratschrner, H. S. Kim, M. G. R. Thomson, K. Y. Lee, S. A. Rishton, M. L. Yu, and T. H. P. Chang, 'An electronbeam microcolumn with improved resolution, beam current, and stability,' J. Vac. Sci. Technol. B vol.,13, no. 6, pp. 2498-2503, 1995 DOI |
7 | D. W. Kim and Y. Kim, 'Point collocation methods using the fast moving least-square reproducing kernel approximation,' Int. J. Numer. Meth. Engng., vol. 56, pp. 1445-1464, 2003 DOI ScienceOn |