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http://dx.doi.org/10.3807/KJOP.2002.13.4.363

Design and characterization of conductive transparent filter using [TiO2|Ti|Ag|TiO2] multilayer  

Lee, Seung-Hyu (Department of Physics, Inha University)
Lee, Jang-Hoon (Department of Physics, Inha University)
Hwangbo, Chang-Kwon (Department of Physics, Inha University)
Publication Information
Korean Journal of Optics and Photonics / v.13, no.4, 2002 , pp. 363-369 More about this Journal
Abstract
We have designed conductive transparent filters using a low-emissivity coating such as [dielectric|Ag|dielectric] for display applications. The design is the repetition of [$TiO_{2}$|Ti|Ag |$TiO_{2}$] to increase the transmittance in the visible and decrease the transmittance in the near IR. The conductive transparent filters are deposited by a radio frequency(RF) magnetron sputtering system. The optical, structural and electrical properties of the filters were investigated and the optical spectra are compared with simulated spectra. The thickness of the deposited Ag films is above 13 ㎚ to increase the conductivity and that of $TiO_{2}$ films is 24 ㎚ to increase the transmittance in the visible range. Ti blockers are employed to prevent the Ag films from being oxidized by an oxygen gas during the reactive sputtering process. Also, it is shown that the thicker Ti film is necessary as the period increases. Finally, a filter with repetition of the basic structure three times shows the better cut-off near infrared(NIR) and the sheet resistance as low as 2Ω/□ which is enough to shield an unnecessary electromagnetic waves for a display panel.
Keywords
optical material; thin film; display materials;
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1 D. W. Linch, W. R. Hunter, and G. W. Ribarsky, “Comments on the optical constants of metals and an introduction to the data for several Metals,” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, Orlando, Fla., 1985), pp. 350-368.
2 H. Weis, T. Müggenberg, P. Grosse, L. Herlitze, I. Friedrich, and M. Wutig, “Advanced characterization tools for thin films in low-E systems,” Thin Solid Films, vol. 351, pp. 184-189, 1999.   DOI   ScienceOn
3 G. Leftheriotis, P. Yianoulis, and D. Patrikios, “Deposition and optical properties of optimized ZnS/Ag/ZnS thin films for energy saving applications,” Thin Solid Films, vol. 306, pp. 92-99, 1997.   DOI   ScienceOn
4 J. J. Finley, “The evolution of solar infrared reflective glazing in automobiles,” in 44th Annual Technical Conference Proc., SVC, Philadelphia, Pennsylvenia, USA, pp. 193-203, 2001.
5 P. H. Berning, “Principles of design of architectural coatings,” Appl. opt., vol. 24, pp. 4127-4141, 1983.   DOI   PUBMED
6 H. J. Gläser, Large area glass coating (Von Ardenne, Dresden, 2000), pp. 206, 220-226.
7 이경준, 이진구, 박주동, 김진현, 김영환, 오태성, "확산방지막에 따른 TiO_2/M/Ag/M/TiO_2 투명 열전연 박막의 광학적 성질," 한국진공학회지, 제5권 2호, pp. 147-155, 1996.
8 H. Schilling, J. Szczyrbowski, M. Ruske, and W. Lenz, “New layer system family for architectural glass based on dual twin-magnetron sputtered TiO2,” in 41th Annual Technical Conference Proc., SVC, Boston, MA, USA, pp. 165-173, 1998.
9 O. Treichel, V. Kirchhoff, and G. Bräuer, “The influence of the barrier layer on the mechanical properties of IR-reflecting (low-E) multilayer systems on glass,” in 43rd Annual Technical Conference Proc., SVC, Denver, USA, pp. 121-126, 2000.
10 R. Hermann and G. Bräuer, in R. E. Hummel and K. H. Guenther (ed.), Handbook of Optical Properties vol. 1 (CRC, Boca Raton, Fla., 1995), pp. 174-175.
11 R. Dannenberg and D. Glenn, “Microstructural comparison of Ag films grown on amorphous TiO2 and polycrystalline ZnO,” in 44th Annual Technical Conference Proc., SVC, Philadelphia, Pennsylvenia, USA, pp. 218-224, 2001.
12 H. Ohsaki and Y. Kokubu, “Global market and technology trends on coated glass for architectural, automotive and display applications,” Thin Solid Films, vol. 351, pp. 1-7, 1999.   DOI   ScienceOn
13 H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (Institute of Physics Publishing, Bristol, UK, 2001), pp. 37-85, 579, 583-585.
14 황보창권, 박막광학(다성, 서울, 2001), pp. 57-68, 110-118, 184-196, 313-318.
15 P. Grosse, R. Hertling, and T. Müggenberg, “Design of low emissivity systems based on a three-layer coating,” Journal of Non-Crystalline Solids, vol. 218, pp. 38-43, 1997.   DOI   ScienceOn
16 B. T. Sullivan and K. L. Byrt, “Metal/dielectric transmission interference filters with low reflectance. 2. Experimental results,” Appl. Opt., vol. 34, pp. 5684-5694, 1995.   DOI