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http://dx.doi.org/10.7734/COSEIK.2015.28.1.79

A Numerical Study on the Alignment of Surface Structures on Silicon-germanium Thin Films under a Localized Modulation of Surface Diffusivity  

Kim, Yun Young (Department of Mechanical Engineering, Northwestern University)
Han, Bong Koo (Department of Civil Engineering, Seoul National University of Science and Technology)
Publication Information
Journal of the Computational Structural Engineering Institute of Korea / v.28, no.1, 2015 , pp. 79-83 More about this Journal
Abstract
This paper presents a numerical study on the alignment of ridge-like surface structures evolving on silicon-germanium thin films under localized modulation of surface diffusivity. A situation is considered in which the surface diffusion of film material is selectively promoted such that its morphology is perturbed to periodic patterns. To simulate the growth behavior, a governing equation is formulated taking the surface chemical potential into account, and its solution is numerically sought using a finite-difference method. Results show that an initially planar surface coalesces upon the diffusivity modulation, and the surface structures can be aligned by changing the frequency of modulation condition. This research suggests a bottom-up fabrication technique that can manage the regularity of surface structures for thin film devices.
Keywords
numerical study; silicon-germanium; surface structures; local surface diffusivity enhancement;
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