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Optimum Design of Rail in Semiconductor Processing  

조재승 (부산대학교 대학원 기계설계공학과)
김학선 (해양대학교 기관공학과)
황종균 ((주)대명엔지니어)
임오강 (부산대학교 기계공학부 기계기술연구소)
Publication Information
Journal of the Computational Structural Engineering Institute of Korea / v.17, no.3, 2004 , pp. 241-249 More about this Journal
Abstract
There is an over head hoist transporter(OHT) by the system for delivering the wafer in semiconductor processing. The transfer system consist of carrier, vehicle, rail and support. The Tail supporting the wafer and the transfer system should maintain enough strength and stiffness. To achieve lightness and enough strength and stiffness, optimization algorithm should be introduced in design process. In this study, two kinds of section shapes as L-type, C-type is carried out the structure analysis and optimization. Total weight of rail is to be minimized while displacement should not exceed limit. To improve the initial model, topology optimization is done by the plain problem. Size optimization is done with 3D solid element and PLBA algorithm, the RQP algorithm. The weight of optimum model as L-type, C-type is decreased by 2.3%, 10% respectively. It is improved better than the initial model in the strength and stiffness of the structure.
Keywords
over head hoist transporter; topology optimization; size optimization;
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