Fabrication of 5,000V, 4-Inch Light Triggered Thyristor using Boron Diffusion Process and its Characterization
![]() |
Park, Kun-Sik
(ICT Creative Research Lab., ETRI)
Cho, Doohyung (ICT Creative Research Lab., ETRI) Won, Jongil (ICT Creative Research Lab., ETRI) Lee, Byungha (Agency for Defense Development) Bae, Youngseok (Agency for Defense Development) Koo, Insu (Hyundai WIA Corp.) |
1 | B. J. Baliga, Fundamentals of Power Semiconductor Devices, New York, NY, USA: Springer-Verlag, 2008. |
2 | M. Bellini and J. Vobecky, "3D TCAD analysis of the effect on dI/dt of cathode shorts in phase controlled thyristors," 2016 International Conference on Simulation of Semiconductor Processes and Devices, Nuremberg, Germany, pp. 125-128, Oct. 2016. |
3 | US patent 6,066,864 A, 23 May 2000. |
4 | J. Vobecky, H. J. Schulze, P. Streit, F. J. Niedernostheide, V. Botan et al., "Silicon thyristors for ultrahigh power (GW) applications," IEEE Transactions on Electron Devices, Vol. 64, pp. 760-768, Mar. 2017. DOI |
5 | H. J. Schulze and R. Kunhnert, "Realization of a high-voltage planar junction termination for power devices," Solid-State Electronics, Vol. 32, No. 2, pp. 175-176, 1989. DOI |
6 | M. Ruff, H. J. Schulze, and U. Kellner, "Progress in the development of an 8-kV light-triggered thyristor with integrated protection functions," IEEE Transactions on Electron Devices, Vol. 46, No. 8, pp. 1768-1774, Aug. 1999. DOI |
7 | US patent 6,373,079 B1, 16 Apr. 2002. |
8 | Y. Shimizu, H. Kozaka, S. Murakami, and M. Takata, "An overvoltage self-protected thyristor with a structure to predict breakover voltage," IEEE Transactions on Electron Devices, Vol. 43, pp. 1000-1006, Jun. 1996. DOI |
9 | J. Przybilla, J. Dorn, R. Barthelmess, U. Kellner-Werdehausen, H. J. Schulze et al., "Diodes and thyristor - past, presence and future," in Proc. of the EPE 2009, Barcelona, 2009. |
10 | J. Vobecky, "Future trends in high power devices," Microelectronics Proceedings (MIEL), 2010 27th International Conference on, pp. 67-72, May 2010. |
11 | G. Lyu, Z. Yu, R. Zeng, J. Liu, X. Zhang, T. Long, and P. Palmer, "Optimisation of gate-commutated thyristors for hybrid DC breakers," ITE Power Elecgtronics, Vol. 10, pp. 2002-2009, Nov. 2017. DOI |
12 | J. Przybillia, R. Keller, U. Kellner, J. J. Schulze, F. J. Niedernostheide, and T. Peppel, "Direct light-triggered solid-state switches for pulsed power applications," Digest 14th Inter. IEEE Pulsed Power Conf., pp. 150-154, Jun. 2003. |
13 | T. G. S. Joshi and V. John, "Performance comparison of ETT- and LTT-based pulse power crowbar switch," IEEE Transactions on Plasma Science, Vol. 45, pp. 2994-3000, Nov. 2017. DOI |
14 | H. J. Schulze, F. J. Niedernostheide, and U. Kellner-Werdehausen, "Thyristor with integrated forward recovery protection function," in Proc. of 2001 Int. Symp. on Power Semiconductor Devices and IC's, Osaka, Japan, pp. 199-202, 2001. |
![]() |