Electrical Variable Capacitor based on Symmetrical Switch Structure for RF Plasma System |
Min, Juhwa
(Dept. of Electrical Engineering, Smart Grid Research Center, Chonbuk Nat'l University)
Chae, Beomseok (Dept. of Electrical Engineering, Smart Grid Research Center, Chonbuk Nat'l University) Kim, Hyunbae (Manufacturing Technology Center, Samsung Electronics) Suh, Yongsug (Dept. of Electrical Engineering, Smart Grid Research Center, Chonbuk Nat'l University) |
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