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플라즈마 발생용 자동정합회로
플라즈마 발생용 자동정합회로
최대규
((주) 뉴파워 프라즈마 대표)
원충연
(성균관대 전기전자 및 컴퓨터 공학부)
Publication Information
KIPE Magazine
/
v.7, no.1
, 2002 , pp. 16-20
More about this Journal
More about this Journal
Frequency : Bimonthly
Publisher : The Korean Institute of Power Electronics
KISTI Subject :
SCOPUS Subject :
Engineering
,
Electrical and Electronic Engineering
,
Surfaces and Interfaces
Web of Science Subject :
Engineering, Electrical &electronic
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