UV nanoimprint lithography using a multi-dispensing method |
심영석
(한국기계연구원 나노메카니즘그룹)
손현기 (한국기계연구원 레이저응용시스템그) 신영재 (한국기계연구원 나노메카니즘그) 이응숙 (한국기계연구원 지능형정밀기계연구) 정준호 (한국기계연구원 나노메카니즘그룹) |
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