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나노 임프린팅 장비의 개발현황과 전망  

Lee Jae-Jong (한국기계연구원 지능형정밀기계연구본부)
Kim Du-Hyeong (한국기계연구원 지능형정밀기계연구본부)
Hwang Gyeong-Hyeon (한국기계연구원 지능형정밀기계연구본부)
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ICROS / v.12, no.1, 2006 , pp. 31-35 More about this Journal
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1 B. Michel. et al. 'Printing meets lithography: soft approaches to high-resolution patterning', IBM, J. Res. & Dev., vol. 45, no. 5, Sep., 2001
2 T. Haatainen, et al. 'Step and stamp imprint lithography using a commercial flip chip bonder,' Inter. NNT conference, Dec., 2002
3 D. J. Resnick, et al, 'High resolution templates for step and flash imprinting lithography,' J. of Microlitho. Microieb. Microsyst. vol. 1, no. 3, Oct., 2002
4 S. Y. Chou, et al. 'Imprint Lithography woth 8ub-10nm Feature Size and High Throughput', Microelectronics Engineering, No. 35, 1997
5 C. Schaefer, et al. 'State of the art automated nanoprinting of polymers and its challenges,' 7th International conference on the commercialization of micro and nano systems CMOS, Sep., 8-12, 2002
6 B. J. Choi, S. Johnson, M. Colburn, S. V. Sreenivasan and C. G. Willson, 1999, 'Design of Template Alignment Stages for Step & Flash Imprint Lithography,' Prof of ASPE 1999 Annual Meeting
7 S.V. Sreenivasan, et al, 'Low-cost nanostructure patterning using step and flash imprint lithography,' NIST-SPIE Conference on Nanotechnology, Sep, 2001