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반경험적 모델에 근거한 RTP 장비의 다변수 반복 학습제어  

조문기 (㈜콘웰 배치 사업부)
이용희 (서강대학교 화공생명공학과)
주상래 (서강대학교 화공생명공학과)
이광순 (서강대학교 화공생명공학과)
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ICROS / v.10, no.2, 2004 , pp. 19-34 More about this Journal
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