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차세대 IT산업에 MEMS기술의 응용  

박재영 (마이크로시스템 그룹, 소자재료 연구소, 엘지전자기술원)
부종옥 (마이크로시스템 그룹, 소자재료 연구소, 엘지전자기술원)
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ICROS / v.8, no.1, 2002 , pp. 39-47 More about this Journal
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