Browse > Article
http://dx.doi.org/10.5207/JIEIE.2011.25.12.048

Fabrication and Characterization of Gate Insulator Thin Films prepared by Plasma Polymerization  

Son, Young-Do (인천대학교 안전공학과)
Hwang, Myung-Whan (인천대학교 안전공학과)
Lim, Jae-Sung (하나마이크론 주식회사 연구소)
Shin, Paik-Kyun (인하대학교 전기공학부)
Publication Information
Journal of the Korean Institute of Illuminating and Electrical Installation Engineers / v.25, no.12, 2011 , pp. 48-53 More about this Journal
Abstract
Polymer thin films were prepared by capacitively coupled plasma polymerization process for application of gate insulator. The polymer thin films revealed to form polymer layers with original properties of the monomer. Among the plasma polymer thin films, the styrene polymer having large number of phenyl sites revealed higher dielectric constant of k=3.7 than that of conventional polymer. The plasma polymerized styrene thin film revealed no hysteresis characteristics and low leakage current density of $1{\times}10^{-8}[Acm^{-2}]$ at field strength of $1[MVcm^{-1}]$, which measured by I-V and C-V measurements using MIM and MIS devices.
Keywords
Plasma Polymer; Gate Insulator Thin Film; Leakage Current Density; Organic Semiconductor Device;
Citations & Related Records
연도 인용수 순위
  • Reference
1 M. H. Yooon, C. Kim, A. Facchetti, and T. J. Marks, "Gate Dielectric Chemical Structure-Organic Field-Effect Transistor Performance Correlations for Electron, Hole, and Ambipolar Organic Semiconductors", J. Am. Chem. Soc., Vol. 287, Iss. 39, pp. 12851-12869, Sep. 2006.
2 C. Riedel, G. A. Schwartz, R. Arinero, G. Leveque, A. Alegria, and J. Colmenero, "Nanoscale Dielectric Properties of Insulating Thin Films: From Single Point Measurements to Quantitative Images", Ultramicroscopy, Vol. 110, Iss. 6, pp. 634-638, May 2010.   DOI
3 S. Morita, J. Tamano, S. Hattori, and M. Ieda, "Plasma Polymerized Methyl-Methacrylate as an Electron-Beam Resist", J. Appl. Phys., Vol. 51, Iss. 7, pp. 3938-3941, Jul. 1980.   DOI
4 Y. Jang, D. H. Kim, Y. D. Park, J. H. Cho, M. Hwang, and K. Cho, "Low-Voltage and High-Field-Effect Mobility Organic Transistors with Polymer Insulator", Appl. Phys. Lett., Vol. 88, Iss. 7, pp.072101, Feb. 2006.   DOI
5 J. S. Lim and P. K. Shin, "Improved Performance of Organic Light-Emitting Devices with Plasma Treated ITO and Plasma Polymerized Methyl Methacrylate Buffer Layer", Appl. Surf. Sci., Vol. 253, Iss. 8, pp. 3828-3833, Feb. 2007.   DOI
6 J. H. Park, J. H. Bae, W. H. Kim, S. D. Lee, J. S. Gwang, D. W. Kim, J. C. Noh, and J. S. Choi, "The Surface Energy-dictated inintial Growth of a Pentacene Film on a Polymeric Adhesion Layer for Field-Effect Transistors", Solid-State Electronics, Vol. 54, Iss. 12, pp. 1650-1656, Dec. 2010.   DOI   ScienceOn
7 H. W. Zan and C. W. Chou, "Effect of Surface Energy on Pentacene Thin-Film Growth and Organic Thin Film Transistor Characteristics", Jpn. J. Appl. Phys., Vol. 48, No.3, pp.031501, Mar. 2009.   DOI
8 M. Yoshida, S. Uemura, T. Kodzasa, T. Kamata, M. Matsuzawa, and T. Kawai, "Surface Potential Control of an Insulator Layer for the High Performance Organic FET", Synthetic Metals, Vol. 137, Iss. 1-3, pp. 967-968, Apr. 2003.   DOI
9 W. Y. Chou, C. W. Kuo, H. L. Cheng, Y. R. Chen, F. C. Tang, F. Y. Yang, D. Y. Shu, and C. C. Liao, "Effect of Surface Free Energy in Gate Dielectric in Pentacene Thin-Film Transistors", Appl. Phys. Lett., Vol. 89, Iss. 11, pp. 112126, Sep. 2006.   DOI
10 S. Y. Yang, K. Shin, and C. E. Park, "The Effect of Gate-Dielectric Surface Energy on Pentacene Morphology and Organic Field-Effect Transistor Characteristics", Advanced Functional Materials, Vol. 15, Iss. 11, pp. 1806-1814, Nov. 2005.   DOI
11 Y. V. Pan, E. Z. Barrios, D. D. Denton, "In situ FTIR Investigation of MMA Plasmas, Plasma-polymerized Films, and Reaction Mechanisms", J. Polym. Sci. Part A: Polym. Chem., Vol. 36, Iss. 4, pp. 587-602, Mar. 1998.   DOI
12 H. Klauk, Organic Electronics: Materials, Manufacturing and Applications, WILEY-VCH GmbH, Chapter 6, 2006.
13 Y. Y. Lin, D. J. Gundlach, S. F. Nelson, and T. N. Jackson, "Pentacene-based Organic Thin-Film Transistors", IEEE Transactions on Electron Devices, Vol. 44, Iss. 8, pp. 1325-1331, Aug. 1997.   DOI
14 C. Zhang, J. Wyatt, and D. H. Weinkauf, "Carbon Dioxide Sorption in Conventional and Plasma Polymerized Methyl Methacrylate Thin Films", Polymer, Vol. 45, Iss. 22, pp. 7665-7671, Oct. 2004.   DOI