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http://dx.doi.org/10.7736/KSPE.2016.33.8.691

Study on the Nanoscale Behavior of ALD Pt Nanoparticles at Elevated Temperature  

An, Jihwan (Department of Manufacturing Systems and Design Engineering, Seoul National University of Science and Technology)
Publication Information
Journal of the Korean Society for Precision Engineering / v.33, no.8, 2016 , pp. 691-695 More about this Journal
Abstract
This paper covers the investigation of the microscale behavior of Pt nanostrucures fabricated by atomic layer deposition (ALD) at elevated temperature. Nanoparticles are fabricated at up to 70 ALD cycles, while congruent porous nanostructures are observed at > 90 ALD cycles. The areal density of the ALD Pt nanostructure on top of the SiO2 substrate was as high as 98% even after annealing at $450^{\circ}C$ for 1hr. The sheet resistance of the ALD Pt nanostructure dramatically increased when the areal density of the nanostructure decreased below 85 - 89% due to coarsening at elevated temperature.
Keywords
Atomic layer deposition; Platinum catalyst; Thermal stability; Nanostructure;
Citations & Related Records
Times Cited By KSCI : 6  (Citation Analysis)
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1 Yoon, K.-J. and Song, O.-S., "Property of the Nano-Thick $TiO_2$ Films Using an ALD at Low Temperature," Korean Journal of Materials Research, Vol. 18, No. 10, pp. 515-520, 2008.   DOI
2 An, J., Kim, Y. B., and Prinz, F. B., "Ultra-Thin Catalytic Electrodes Fabricated by Atomic Layer Deposition," Physical Chemistry Chemical Physics, Vol. 15, No. 20, pp. 7520-7525, 2013.   DOI
3 Tanveer, W. H., Ji, S., Yu, W., and Cha, S. W., "Characterization of Atomic Layer Deposited and Sputtered Yttria-Stabilized-Zirconia Thin Films for Low-Temperature Solid Oxide Fuel Cells," Int. J. Precis. Eng. Manuf., Vol. 16, No. 10, pp. 2229-2234, 2015.   DOI
4 Lee, W. Y. and Prinz, F. B., "Localized Charge Transfer Reactions Near the Pt-YSZ Interfaces Using Kelvin Probe Microscopy," Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 1, No. 3, pp. 201-205, 2016.
5 Choi, H., Cho, G. Y., and Cha, S. W., "Fabrication and Characterization of Anode Supported YSZ/GDC Bilayer Electrolyte SOFC Using Dry Press," Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 1, No. 2, pp. 95-99, 2014.   DOI
6 Seo, Y. H., Kim, H. J., Jang, W. K., and Kim, B. H., "Development of Active Breathing Micro PEM Fuel Cell," Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 1, No. 2, pp. 101-106, 2014.   DOI
7 An, J., Kim, Y. B., Jung, H. J., Park, J. S., Cha, S. W., et al., "Structural and Compositional Analysis of Solid Oxide Fuel Cell Electrolytes Using Transmission Electron Microscopy," Int. J. Precis. Eng. Manuf., Vol. 13, No. 7, pp. 1273-1279, 2012.   DOI