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http://dx.doi.org/10.7736/KSPE.2014.31.3.207

Fabrication of Micro/nanoscale Cutting Tool Geometry of Single Crystal Diamond Tool by Focused Ion Beam  

Baek, Seung Yub (Department of Mechanical Design, Induk Univ.)
Jang, Sung Min (Department of Naval Architecture & Mechanics, Chosun College of Science & Technology)
Publication Information
Journal of the Korean Society for Precision Engineering / v.31, no.3, 2014 , pp. 207-213 More about this Journal
Abstract
A study was carried out to fabricate the cutting tool geometry with micro/nanoscale on the single crystal diamond tool by using the FIB. The FIB technique is an ideal tool for TEM sample preparation that allows for the fabrication of electron-transparent foils. The FIB is appropriate techniques to sample and subsequently define the chemical composition and the structural state of mineral inclusion on the micro/nanoscale. The combination of FIB with a SEM allows for 3D information to be obtained from samples including 3D imaging. Cutting strategies were demonstrated to improve the performance of cutting tool geometry and to generate high aspect ratio micro cutting tool. A finely focused beam of 30keV Ga+ ions was used to mill cutting tool shapes for various micro patterns. Therefore FIB sputtering is used to shape a variety of cutting tools with dimensions in the $1-5{\mu}m$ range and cutting edge radii of curvature of under 50nm.
Keywords
Focused Ion Beam; Diamond Tool Geometry; High Aspect Ratio; Cutting Edge Width;
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