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http://dx.doi.org/10.7736/KSPE.2014.31.3.181

Micro Groove Cutting Using Diamond Tools  

Choi, Young Jae (IT Converged Process R&BD Group, Korea Institute of Industrial Technology)
Song, Ki Hyeong (IT Converged Process R&BD Group, Korea Institute of Industrial Technology)
Lee, Seok Woo (IT Converged Process R&BD Group, Korea Institute of Industrial Technology)
Choi, Hon Zong (IT Converged Process R&BD Group, Korea Institute of Industrial Technology)
Publication Information
Journal of the Korean Society for Precision Engineering / v.31, no.3, 2014 , pp. 181-187 More about this Journal
Abstract
Micro patterns are used to maximize the performance and efficiency of the product in many industries such as energy, display, printing, biology, etc. Nowadays, the fabrication technology for micro patterns has been developed in various ways such as photolithography, laser machining, electrical discharge machining and mechanical machining. Recently, mechanical machining the size of smaller than 1 micrometer could be tried, because the technology related to the machining was developed brilliantly. This paper shows the experiments using cutting processes in order to fabricate the micro pattern. Micro patterns of the size of several micrometers were machined by the diamond tools of two different shape, the deformation and generation of burr were investigated.
Keywords
Micro Machining; Diamond Tool; Micro Pattern; Diffractive Optical Element;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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