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http://dx.doi.org/10.7736/KSPE.2014.31.12.1115

Design and Manufacturing of an Ultrasonic Waveguide for Nano-surface Treatment  

Kim, Hyunse (Extreme Mechanical Engineering Research Division, Korea Institute of Machinery and Materials)
Lee, Yanglae (Extreme Mechanical Engineering Research Division, Korea Institute of Machinery and Materials)
Lim, Euisu (Extreme Mechanical Engineering Research Division, Korea Institute of Machinery and Materials)
Publication Information
Journal of the Korean Society for Precision Engineering / v.31, no.12, 2014 , pp. 1115-1119 More about this Journal
Abstract
In this article, a 20 kHz ultrasonic waveguide for nano-surface treatment was designed and manufactured. When designing the system, finite element analysis with ANSYS software was performed to find optimal dimensions of the waveguide, which can raise energy efficiency. Consequently an anti-resonance frequency of an Al waveguide with a piezoelectric actuator was 20 kHz, which predicted the experimentally obtained value of 18 kHz well. For the assessment of the performance, Steel Use Stainless (SUS) 304 and chromium molybdenum steel (SCM) 435 specimens were tested. Cross-sectional microscopies of SUS304 were taken and they showed that the treated thickness was $30{\mu}m$. Additionally, hardness tests of SCM435 were done and the hardness before the process was 14.0 Rockwell Hardness-C scale (HRC) and after the process was 20.5 HRC, respectively, which means 46% increase. Considering these results, the developed ultrasonic system is thought to be effective in the nano-surface treatment process.
Keywords
Ultrasonic Waveguide; Nano-surface Treatment; Finite Element Method(FEM); Hardness; Optimal Design;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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2 Amanov, A., Cho, I. -S., Kim, D. -E., and Pyun, Y. - S., "Fretting Wear and Friction Reduction of CP Titanium and Ti-6AL-4V Alloy by Ultrasonic Nanocrystalline Surface Modification," Surface and Coatings Technology, Vol. 207, pp. 135-142, 2012.   DOI
3 Kim, H., Lee, Y., and Lim, E., "Design and Fabrication of an L-type Waveguide Megasonic System for Cleaning of Nano-Scale Patterns," Current Applied Physics, Vol. 9, pp. e189-e192, 2009.   과학기술학회마을   DOI
4 Kim, H., Lee, Y., and Lim, E., "Design and Fabrication of a Horn-Type Megasonic Waveguide for Nanoparticle Cleaning," IEEE Transactions on Semiconductor Manufacturing, Vol. 26, No. 2, pp. 221-225, 2013.   DOI
5 Kim, H., Lee. Y., and Lim, E., "A Quartz-Bar Megasonic System for Nano-Pattern Cleaning," Int. J. Precis. Eng. Manuf., Vol. 14, No. 10, pp. 1713-1718, 2013.   과학기술학회마을   DOI
6 Amanov, A., Pyun, Y.-S., and Sasaki, S., "Effects of Ultrasonic Nanocrystalline Surface Modification (UNSM) Technique on the Tribological Behavior of Sintered Cu-based Alloy," Tribology International, Vol. 72, pp. 187-197, 2014.   DOI