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http://dx.doi.org/10.7736/KSPE.2012.29.11.1256

Replication Characteristics of Micro-Patterns according to the Vibration Transmission Direction in the Ultrasonic Imprinting Process  

Seo, Young-Soo (Graduate School of NID Fusion Technology, Seoul National Univ. of Science and Technology)
Lee, Ki-Yeon (Graduate School of NID Fusion Technology, Seoul National Univ. of Science and Technology)
Cho, Young-Hak (Dept. Mechanical System Design Engineering, Seoul National Univ. of Science and Technology)
Park, Keun (Dept. Mechanical System Design Engineering, Seoul National Univ. of Science and Technology)
Publication Information
Journal of the Korean Society for Precision Engineering / v.29, no.11, 2012 , pp. 1256-1263 More about this Journal
Abstract
The present study covers the ultrasonic patterning process to replicate micro-patterns on a polymer substrate. The ultrasonic patterning process uses ultrasonic waves to generate frictional heat between an ultrasonic horn and the polymer substrate, from which the surface region of the polymer substrate is softened sufficiently for the replication of micro-patterns. The ultrasonic patterning process can divided into two categories according to the direction of vibration transmission: direct patterning and indirect patterning. The direct patterning uses a patterned horn, and the ultrasonic vibration is transferred directly from the patterned horn to the substrate. On the contrary, the indirect patterning process uses a plain horn, and the micro-patterns are engraved on a mold that is located below the substrate. Thus, the micro-patterns are replicated as an indirect manner. In this study, these direct and indirect patterning processes are compared in terms of the replication characteristics. Additionally, the possibility of double-side patterning is also discussed in comparison with the conventional single-side patterning process.
Keywords
Ultrasonic Imprinting; Direct Patterning; Indirect Patterning;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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