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http://dx.doi.org/10.7736/KSPE.2012.29.10.1089

Micromachining Using Laser Beam Machining and Electrochemical Etching  

Kim, Jang-Woo (Department of Chemical Engineering, Yonsei Univ.)
Kwon, Min-Ho (School of Mechanical and Aerospace Engineering, Seoul National Univ.)
Chung, Do-Kwan (School of Robot and Automation Engineering, Dongyang Mirae Univ.)
Chu, Chong-Nam (School of Mechanical and Aerospace Engineering, Seoul National Univ.)
Publication Information
Journal of the Korean Society for Precision Engineering / v.29, no.10, 2012 , pp. 1089-1095 More about this Journal
Abstract
Laser beam machining (LBM) using nanosecond pulsed laser is widely known to be rapid and non-wear process for micromachining. However, the quality itself cannot meet the precision standard due to the recast layer and heat affected zone. In this paper, a fabrication method for machining micro features in stainless steel using a hybrid process of LBM using nanosecond pulsed laser and electrochemical etching (ECE) is reported. ECE uses non-contacting method for precise surface machining and selectively removes the recast layer and heat affected zone produced by laser beam in an effective way. Compared to the single LBM process, the hybrid process of LBM and ECE enhanced the quality of the micro features.
Keywords
Micromachining; Electrochemical Etching; Laser Beam Machining; Hybrid Machining;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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1 Chung, D. K., Shin, H. S., Park, M. S., Kim, B. H., and Chu, C. N., "Recent Researches in Micro Electrical Machining," Int. J. Precis. Eng. Manuf., Vol. 12, No. 2, pp. 371-380, 2011.   과학기술학회마을   DOI   ScienceOn
2 Rajurkar, K. P., Levy, G., Malshe, A., Sundaram, M. M., McGeough, J., Hu, X., Resnick, R., and DeSilva, A., "Micro and nano machining by electro-physical and chemical processes," CIRP Annals-Manuf. Technol., Vol. 55, No. 2, pp. 643-666, 2006.   DOI
3 Tonshoff, H. K., Alvensleben, F., Ostendprf, A., Kamlage, G., and Nolte, S., "Micromachining of Metals Using Ultrashort Laser Pulses," International Journal of Electrical Machining, No. 4, pp. 1-6, 1999.
4 Meijer, J., Du, K., Gilner, A., Hoffmann, D., Kovalenko, V. S., Masuzawa, T., Ostendon, A., Poprawe, R., and Schulz, W., "Laser Machining by Short and Ultrashort Pulses, State of the Art and New Opportunities in the Age of the Photons," Annals of the CIRP, Vol. 51, No. 2, pp. 531-550, 2002.   DOI
5 Kim, S., Chung, D. K., Kim, B. H., Oh, K. H., Jeong, S., and Chu, C. N., "Micromachining Using Hybrid of Laser Beam and Electrical Discharge Machining," J. of the KSPE, Vol. 26, No. 10, pp. 108-115, 2009.
6 Kwon, M. H., Shin, H. S., Chung, D. K., and Chu, C. N., "Micro ECM Using Nanosecond Pulsed Laser," Proc. of KSPE Autumn Conference, pp. 107-108, 2010.
7 Lee, E. S., Lee, J. H., Kim, W. M., and Chun, Y. J., "Removal of Micro Burr by Using Electrolyticdeburring," J. of the KSPE, Vol. 22, No. 9, pp. 20-26, 2005.
8 Lee, E. S. and Kim, C. G., "A Study on machining characteristics of the Electropolishing of Aluminum alloy," Transactions of the Korean Society of Mahchine Tool Engineers, Vol. 12, No. 2, pp. 17-22, 2003.