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The Study of Micro Fabrication using Picosecond Laser Ablation  

Noh, Ji-Whan (KIMM, Korea Institute of Machinery & Materials)
Sohn, Hyon-Kee (KIMM, Korea Institute of Machinery & Materials)
Suh, Jeong (KIMM, Korea Institute of Machinery & Materials)
Lee, Jae-Hoon (KIMM, Korea Institute of Machinery & Materials)
Publication Information
Journal of the Korean Society for Precision Engineering / v.27, no.2, 2010 , pp. 25-28 More about this Journal
Abstract
The micro fabrication on the mold material using picosecond laser ablation processing has been studied. We used the two kind of system with picosecond laser. First one is two mirror type scanner and telecentric f-theta lens. Second one is X-Y stage and objective lens. By using these system, the $100{\mu}m$ size chess patterning and $2{\mu}m$ size patterning was fabricated. Especially $2{\mu}m$ size patterning on the mold material can be used as the decorative rainbow color logo for industrial field. In this paper, it is proved the picosecond laser is effective tool for the laser ablation processing.
Keywords
Picosecond Laser Ablation; Micro Fabrication; Galvano Scanner; Diffraction Grating;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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