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Recent Trends of Nano-stereolithography Process for Fabrication of 3D Nano/micro Structures and Its Applications  

Yang, Dong-Yol (Department of Mechanical Engineering, Korea Advanced Institute of Science & Technology)
Lim, Yae-Woo (Department of Mechanical Engineering, Korea Advanced Institute of Science & Technology)
Son, Yong (Department of Mechanical Engineering, Korea Advanced Institute of Science & Technology)
Publication Information
Journal of the Korean Society for Precision Engineering / v.26, no.8, 2009 , pp. 35-46 More about this Journal
Keywords
Nano-Stereolithography; Femtosecond Laser; Two-photon Absorption Phenomenon; 3D Microstructures;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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1 Choi, J., Wicker, R. B., Cho, S., Ha, C. and Lee, S., "Cure depth control for complex 3D microstructure fabrication in dynamic mask projection microstereolithography," Rapid Prototyping Journal, Vol. 15, No. 1, pp. 59-70, 2009   DOI   ScienceOn
2 Kawata, S., Sun, H., Tanaka, T. and Takada, K., "Finer features for functional microdevices," Nature, Vol. 412, No. 6848, pp. 697-698, 2001   DOI   ScienceOn
3 Lee, K. S., Kim, R. H., Yang, D. Y. and Park, S. H., "Advances in 3D nano/microfabrication using twophoton initiated polymerization," Progress in Polymer Science, Vol. 33, No. 6, pp. 631-681, 2008   DOI   ScienceOn
4 Passinger, S., Saifullah, M. S. M., Reinhardt, C., Subramanian, K. R. V., Chichkov, B. N. and Welland, M. E., "Direct 3D patterning of TiO2 using femtosecond laser pulses," Advanced Materials, Vol. 19, No. 9, pp. 1218-1221, 2007   DOI   ScienceOn
5 Tetreault, N., Freymann, G. V., Deubel, M., Hermatschweiler, M., Perez-Willard, F., John, S., Wegener, M. and Ozin, G. A., "New route to threedimensional photonic bandgap materials: silicon double inversion of polymer templates," Advanced Materials, Vol. 18, No. 4, pp. 457-460, 2006   DOI   ScienceOn
6 Park, S. H., Lim, T. W., Yang, D. Y., Jeong, J. H., Kim, K. D., Lee, K. S. and Kong, H. J., "Effective fabrication of three-dimensional nano/microstructures in a single step using multilayered stamp," Applied Physics Letters, Vol. 88, No. 20, Paper No. 203105, 2006   DOI   ScienceOn
7 Bae, K. M., Ko, J. S., Park, S. H., Lim, T. W. and Yang, D. Y., "Investigation into fabrication of 3D metallic mold for mass replication of microstructures," 11th korean MEMS Conference, pp.15-16, 2009
8 Kato, J., Takeyasu, N., Adachi, Y., Sun, H. and Kawata, S., "Multiple-spot parallel processing for laser micronanofabrication," Applied Physics Letters, Vol. 86, No. 4, Paper No. 044102, 2005   DOI   ScienceOn
9 Chen, Q., Wu, D., Niu, L., Wang, J., Lin, X., Xia, H. and Sun, H., "Phase lenses and mirrors created by laser micronanofabrication via two-photon photopolymerization," Applied Physics Letters, Vol. 91, No. 17, Paper No. 171105, 2007   DOI   ScienceOn
10 Drakakis, T. S., Papadakis, G., Sambani, K., Filippidis, G., Georgiou, S., Gizeli, E., Fotakis, C. and Farsari, M., "Construction of three-dimensional biomolecule structures employing femtosecond lasers," Applied Physics Letters, Vol. 89, No. 14, Paper No. 144108, 2006   DOI   ScienceOn
11 Maruo, S. and Inoue, H., "Optically driven viscous micropump using a rotating microdisk," Applied Physics Letters, Vol. 91, No. 8, Paper No. 084101, 2007   DOI
12 Lim, T. W., Son, Y. and Yang, D. Y., "Net shape manufacturing of three-dimensional SiCN ceramic microstructures using an isotropic shrinkage method by introducing shrinkage guiders," Int. J. Applied Ceramic Technology, Vol. 5, No. 3, pp. 258-264, 2008   DOI   ScienceOn
13 Ishikawa, A., Tanaka, T. and Kawata, S., "Improvement in the reduction of silver ions in aqueous solution using two-photon sensitive dye," Applied Physics Letters, Vol. 89, No. 11, Paper No. 113102, 2006   DOI   ScienceOn
14 Ikuta, K., Sato, F., Kadoguchi, K. and Itoh, S., "Optical driven master-slave controllable nanomanipulator with real-time force sensing," IEEE 21st International Micro Electro Mechanical Systems, pp. 539-542, 2008
15 Kim, J. E., Min, S. K., Chung, S. E. and Kwon, S. H, "Magnetically actuated micromotor with aligned superparamagnetic particle chains," 11th Korean MEMS Conference, pp. 259-260, 2009
16 Campbell, M., Sharp, D. N., Harrison, M. T., Denning R. G. and Turberfield, A. J., "Fabrication of photonic crystals for the visible spectrum by holographic lithography," Nature, Vol. 404, No. 6773, pp. 53-56, 2000   DOI   ScienceOn
17 Yang, D. Y., Park, S. H. and Lim, T. W., "Ultraprecise microreproduction of a threedimensional artistic sculpture by multipath scanning method in two-photon photopolymerization," Applied Physics Letters, Vol. 90, No. 7, Paper No. 013113, 2007   DOI   ScienceOn
18 Dong, X., Zhao, Z. and Duan, X., "Micronanofabrication of assembled threedimensional microstructures by designable multiple beams multiphoton processing," Applied Physics Letters, Vol. 91, No. 12, Paper No. 124103, 2007   DOI   ScienceOn
19 Serbin, J., Egbert, A., Ostendorf, A. and Chichkov, B. N., "Femtosecond laser-induced two-photon polymerization of inorganic–organic hybrid materials for applications in photonics," Optics Letters, Vol. 28, No. 5, pp. 301-303, 2003   DOI   ScienceOn
20 Chung, S., Park, S., Lee, I., Jeong, H. and Cho, D., "Replication techniques for a metal microcomponent having real 3D shape by microcasting process," Microsystem Technologies, Vol. 11, No. 6, pp. 424-428, 2005   DOI   ScienceOn
21 Maruo, S. and Inoue, H., "Optically driven micropump produced by three-dimensional twophoton microfabrication," Applied Physics Letters, Vol. 89, No.14, Paper No. 144101, 2006   DOI   ScienceOn
22 Maruo, S., Ikuta, K. and Korogi, H., "Submicron manipulation tools driven by light in a liquid," Applied Physics Letters, Vol. 82, No. 1, pp. 133-135, 2003   DOI   ScienceOn
23 Gratson, G. M., Garcia-Santamaria, F., Lousse, V., Xu, M., Fan, S., Lewis, J. A. and Braun, P. V., "Direct-write assembly of three-dimensional photonic crystals: conversion of polymer scaffolds to silicon hollow-woodpile structures," Advanced Materials, Vol. 18, No. 4, pp. 461-465, 2006   DOI   ScienceOn
24 Lim, T. W., Son, Y., Yang, D. Y., Kong, H. J., Lee, K. S. and Park, S. H., "Highly effective threedimensional large-scale microfabrication using a continuous scanning method," Applied Physics A, Vol. 92, No. 3, pp. 541-545, 2008   DOI   ScienceOn
25 Liao., C. Y., Bouriauand, M., Baldeck, P. L., Léon, J., Masclet, C. and Chung, T., "Two-dimensional slicing method to speed up the fabrication of micro-objects based on two-photon polymerization," Applied Physics Letters, Vol. 91, No. 3, Paper No. 033108, 2007   DOI   ScienceOn
26 Son, Y., Lim, T. W., Yang, D. Y., Yi, S. W., Kong, H. J. and Park, S. H., "Study on process parameters of a SU8 resin in two-photon stereolithography for the fabrication of robust three-dimensional microstructures," Journal of the KSPE, Vol. 25, No. 1, pp. 130-137, 2008
27 Matsuo, S., Juodkazis, S. and Misawa, H., "Femtosecond laser microfabrication of periodic structures using a microlens array," Applied Physics A, Vol. 80, No. 4, pp. 683-685, 2005   DOI   ScienceOn
28 Pham, T. A., Kim, D. P., Lim, T. W., Park, S. H., Yang, D. Y. and Lee, K. S., "Three-dimensional sicn ceramic microstructures via nano-stereolithography of inorganic polymer photoresists," Advanced Functional Materials, Vol. 16, No. 9, pp. 1235-1241, 2006   DOI   ScienceOn
29 Abbas, N. M., Solomon, D. G. and Bahari, Md. F., "A review on current research trends in electrical discharge machining(EDM)," International Journal of Machine Tools & Manufacture, Vol. 47, No. 7-8, pp. 1214-1228, 2007   DOI   ScienceOn
30 Yamanishi, Y., Sakuma, S., Onda, K. and Arai, F., "Biocompatible polymeric magnetically driven microtool for particle sorting," Journal of Micro-Nano Mechatronics, Vol. 4, No. 1-2, pp. 49-57, 2008   DOI   ScienceOn
31 Ovsianikov, A., Chichkov, B., Mente, P., Monteiro-Riviere, N. A., Doraiswamy, A. and Narayan, R. J., "Two photon polymerization of polymer–ceramic hybrid materials for transdermal drug delivery," Int. J.Applied Ceramic Technology, Vol. 4, No. 1, pp. 22-29, 2007   DOI   ScienceOn
32 Stoneman, M., Fox, M., Zeng, C. and Raicu, V., "Real-time monitoring of two-photon photopolymerization for use in fabrication of microfluidic devices," Lab on a Chip, Vol. 9, No. 6, pp. 819-827, 2009   DOI   ScienceOn
33 Garcia-Santamaria, F., Xu, M., Lousse, V., Fan, S., Braun, P. V. and Lewis, J. A., "A germanium inverse woodpile structure with a large photonic band gap," Advanced Materials, Vol. 19, No. 12, pp. 1567-1570, 2007   DOI   ScienceOn
34 Lim, T. W., Park, S. H., Yang, D. Y., Pham, T. A., Lee, D. H., Kim, D. P., Chang, S. I. and Yoon, J. B., "Fabrication of three-dimensional SiC-based ceramic micropatterns using a sequential micromolding-and-pyrolysis process," Microelectronic Engineering, Vol.83, No. 11-12, pp. 2475-2481, 2006   DOI   ScienceOn
35 Ovsianiko, A., Ostendorf, A. and Chichkov, B. N., "Three-dimensional photofabrication with femtosecond lasers for applications in photonics and biomedicine," Applied Surface Science, Vol. 253, No. 15, pp. 6599-6602, 2007   DOI   ScienceOn
36 Cao, Y., Takeyasu, N., Tanaka, T., Duan, X. and Kawata, S., "3D metallic anostructure fabrication by surfactant-assisted multiphoton-induced reduction," Small, Vol. 5, No. 10, pp. 1144-1148, 2009   DOI   ScienceOn
37 Rill, M. S., Plet, C., Thiel, M., Staude, I., Freymann, G. V., Linden, S. and Wegener, M., "Photonic metamaterials by direct laser writing and silver chemical vapour deposition," Nature Materials, Vol. 7, No. 7, pp. 543-546, 2008   DOI   ScienceOn
38 Tosa, N., Bosson, J., Pierre, M., Rambaud, C., Bouriau, M., Vitrant, G., Stephan, O., Astilean, S. and Baldeck, P. L., "Optical properties of metallic nanostructures fabricated by two-photon induced photoreduction," Proceedings of SPIE, Vol. 6195, Paper No. 619501, 2006   DOI   ScienceOn
39 Son, Y., Lim, T. W., Yang, D. Y., Prabhakaran, P. and Lee, K. S., "Improvement of metallic microstructure precision employing two photon induced photoreduction process," Trans. of KSME(A), Vol. 32, No. 9, pp. 754-760, 2008   과학기술학회마을   DOI
40 Tanaka, T., Ishikawa, A. and Kawata, S., "Twophoton-induced reduction of metal ions for fabricating three-dimensional electrically conductive metallic microstructure," Applied Physics Letters, Vol. 88, No. 8, Paper No. 081107, 2006   DOI   ScienceOn
41 Park, S. H., Jeong, J. H., Choi, D. G., Kim, K. D., Altun, A. O., Lee, E. S., Yang, D. Y. and Lee, K. S., "Adaptive bonding technique for precise assembly of three-dimensional Microstructures," Applied Physics Letters, Vol. 90, No. 23, Paper No. 233109, 2007   DOI   ScienceOn
42 Jeon, S., Park, J., Cirelli, R., Yang, S., Heitzman, C. E., Braun, P. V., Kenis, P. J. A. and Rogers, J. A., "Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks," PNAS, Vol. 101, No. 34, pp. 12428-12433, 2004   DOI   ScienceOn