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Electron Beam Lithography and Nano Imprint Lithography for High-Efficiency Optical Devices  

Cho, Sang-Uk (School of Nano Science and Technology, Pusan Univ.)
Oh, Seung-Hun (School of Nano Science and Technology, Pusan Univ.)
Kim, Chang-Seok (School of Nano Science and Technology, Pusan Univ.)
Jeong, Myung-Yung (School of Nano Science and Technology, Pusan Univ.)
Publication Information
Journal of the Korean Society for Precision Engineering / v.26, no.6, 2009 , pp. 7-13 More about this Journal
Keywords
Optical Devices; Electron Beam Lithography; Nano Imprint Lithography; Photonic Crystal Light Emitting Diode;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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