Nano Replication Technology of Nano Patterns and Application Fields |
Han, Jeong-Won
(Department of Mechanical Engineering, Yonsei Univ.)
Choi, Jun-Hyuk (Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials) Yoo, Yeong-Eun (Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials) Kim, Byeong-Hee (Division of Mechanical Engineering and Mechatronics, Kangwon National Univ.) Lee, Jae-Sook (Research and Development Center, Jeongmoon Information Co., Ltd) Kang, Shin-Ill (Department of Mechanical Engineering, Yonsei Univ.) |
1 | Han, J., Yang, J., Shin, S., Kim, Y. and Kang, S., "Design and Fabrication of Perpendicular Patterned Magnetic Media Using Nanoimprinted Nano Pillar Patterns," IEEE Transactions on Magnetics, Vol. 45, No. 5, pp. 2288-2291, 2009 DOI ScienceOn |
2 | Lee, H., Han, J., Min, B. and Lee, S., "Simulation of Focused Ion Beam Processes for Micro-Nano Machining," Journal of the Korean Society for Precision Engineering, Vol. 25, No. 3, pp. 44-49, 2008 과학기술학회마을 ScienceOn |
3 | Lee, N., Choi, S. and Kang, S., "Self-assembled Monolyaer as an Antiadhesion Layer on a Nickel Nanostamper in the Nanoreplication Preocess for Optoelectronic Applications," Applied Physics Letters, Vol. 88, p. 073101, 2006 DOI ScienceOn |
4 | Lee, D., kim, K., Jeong, J., Lee, E. and Choi, D., "The Surface Treatment Effect for Nanoimprint Lithography using Vapor Deposition of Silane Coupling Agent," Korean Chemical Engineering Research, Vol. 45, No. 2, pp. 149-154, 2007 |
5 | Choi, J., Lee, S., Choi, D., Kim, K., Jeong, J. and Lee, E., "Direct UV-imprint Lithography using Conductive Nanofiller-dispersed UV-curable Resin," Journal of Vacuum Science and Technology B, Vol. 26, No. 4, pp. 1390-1394, 2008 DOI ScienceOn |
6 | Koo, N., Plachetka, U., Otto, M., Bolten, J., Jeong, J., Lee, E. and Kurz, H., "The Fabrication of a Flexible Mold for High Resolution Soft Ultraviolet Nanoimprint Lithography," Nanotechnology, Vol. 19, No. 22, p. 225304, 2008 DOI ScienceOn |
7 | Jeong Moon Information. Co., Ltd, http://www.jmikorea.co.kr |
8 | Kim, Y., Choi, Y. and Kang, S., "Replication of High Density Optical Disc Using Injection Mold with MEMS Heater," Microsystem Technologies, Vol. 11, No. 7, pp. 464-469, 2005 DOI |
9 | Hoshino, T., Itoh M. and Yatagai, T., "AntireflectiveGrating in the Resonance Domain for Display,"Applied Optics, Vol. 46, No. 5, pp. 648-656, 2007 DOI ScienceOn |
10 | Shin, H., Kwon, J., Seo, Y. and Kim, B., "Fabrication of Polymer Master for Antireflective Surface Using Hot Embossing and AAO Process," International Journal of Modern Physics B, Vol. 22, No. 31-32, pp. 5887-5894, 2008 DOI ScienceOn |
11 | Kim, H., Shin, S., Han, J., Han, J. and Kang, S., "Fabrication of Metallic Nano Stamp to Replicate Patterned Substrate using Electron-Beam Recording,Nanoimprinting and Electroforming," IEEE Transactions on Magnetics, Vol. 45, No. 5, pp. 2304-2307, 2009 DOI ScienceOn |
12 | Lee, N., Han, J., Lim, J., Choi, M., Han, Y., Hong, J. and Kang, S., "Injection Molding of Nanopillars for Perpendicular Patterned Magnetic Media with Metallic Nanostamp," Japanese Journal of Applied Physics, Vol. 47, No. 3, pp. 1803-1805, 2008 DOI ScienceOn |
13 | Lim, J., Popall, M. and Kang, S., "Application of Organic/inorganic Hybrid Photopolymer to Fabricate Ultra-high-Density Patterned Substrate," IEEETransactions on Magnetics, Vol. 45, No. 5, pp. 2300-2303, 2009 DOI ScienceOn |