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Fabrication of Monolithic Dual-scale Structure by Advanced Multi-step Capillary Force Lithography (CFL)  

Suh, Kahp-Yang (Department of Mechanical and Aerospace Engineering, Seoul National Univ.)
Kwak, Rho-Kyun (Department of Mechanical and Aerospace Engineering, Seoul National Univ.)
Jeong, Hoon-Eui (Department of Mechanical and Aerospace Engineering, Seoul National Univ.)
Publication Information
Journal of the Korean Society for Precision Engineering / v.26, no.6, 2009 , pp. 14-20 More about this Journal
Keywords
Lithography; Capillarity; Polymer; Curing; Hierarchy;
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