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Fault Detection System Development for a Spin Coater Through Vibration Assessment  

Moon, Jun-Hee (Department of Mechatronics, Dealim University College)
Lee, Bong-Gu (Department of Mechanical Engineering, Dealim University College)
Publication Information
Journal of the Korean Society for Precision Engineering / v.26, no.11, 2009 , pp. 47-54 More about this Journal
Abstract
Spin coaters are the essential instruments in micro-fabrication processes, which apply uniform thin films to flat substrates. In this research, a spin coater diagnosis system is developed to detect the abnormal operation of TFT-LCD process in real time. To facilitate the real-time data acquisition and analysis, the circular-buffered continuous data transfer and the short-time Fourier transform are applied to the fault diagnosis system. To determine whether the system condition is normal or not, a steady-state detection algorithm and a frequency spectrum comparison algorithm using confidence interval are newly devised. Since abnormal condition of a spin coater is rarely encountered, algorithm is tested on a CD-ROM drive and the developed program is verified by a function generator. Actual threshold values for the fault detection are tuned in a spin coater in process.
Keywords
Spin Coater; Rotating Machinery; Fault Diagnosis; Short-time Fourier Transform; Circular-buffered Continuous Data Transfer;
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Times Cited By KSCI : 1  (Citation Analysis)
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