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Simulation of Focused Ion Beam Processes for Micro-Nano Machining  

Lee, Hi-Won (연세대학교 기계공학부)
Han, Jin (연세대학교 기계공학부)
Min, Byung-Kwon (연세대학교 기계공학부)
Lee, Sang-Jo (연세대학교 기계공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.25, no.3, 2008 , pp. 44-49 More about this Journal
Keywords
Focused Ion Beam processing; Geometrical accuracy; Simulation Method;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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