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FIB-Sputtering Process Technology and Its Application  

Kang, Eun-Goo (한국생산기술연구원 e가공공정팀)
Choi, Byoung-Ryul (한국생산기술연구원 e가공공정팀)
Hong, Won-Pyo (한국생산기술연구원 e가공공정팀)
Lee, Seok-Woo (한국생산기술연구원 e가공공정팀)
Choi, Hon-Zong (한국생산기술연구원 e가공공정팀)
Publication Information
Journal of the Korean Society for Precision Engineering / v.25, no.3, 2008 , pp. 23-31 More about this Journal
Keywords
FIB-Sputtering; FIB-CVD; Micro/Nano mold; FIB Processing Technology; FIB Application;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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