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FIB-Sputtering Process Technology and Its Application  

Kang, Eun-Goo (한국생산기술연구원 e가공공정팀)
Choi, Byoung-Ryul (한국생산기술연구원 e가공공정팀)
Hong, Won-Pyo (한국생산기술연구원 e가공공정팀)
Lee, Seok-Woo (한국생산기술연구원 e가공공정팀)
Choi, Hon-Zong (한국생산기술연구원 e가공공정팀)
Publication Information
Journal of the Korean Society for Precision Engineering / v.25, no.3, 2008 , pp. 23-31 More about this Journal
Keywords
FIB-Sputtering; FIB-CVD; Micro/Nano mold; FIB Processing Technology; FIB Application;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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1 Choi, H. Z., Kang, E. G., Lee, S. W. and Hong, W. P., "Development of Nano Machining Technology using Focused Ion Beam," The Korean Society of Machine Tool Engineers Spring Conference, pp.482-486, 2004
2 Youn, S. W., Takahashi, M., Goto, H. and Maeda, R., "Fabrication of micro-mold for glass embossing using focused ion beam, femto-second laser, eximer laser and dicing techniques," Journal of Materials Processing Technology, Vol. 187-188, pp.326-330, 2007   DOI   ScienceOn
3 Watanabe, K., Morita, T. and Kometani, R., "Nanoimprint using three-dimensional microlens mold made by focused-ion-beam chemical vapor deposition," J. Vac. Sci. Technol. B, Vol. 22, No. 1, pp.22-26, 2004   DOI   ScienceOn
4 Reyntjens, S. and Puers, R., "A review of focused ion beam applications in microsystem technology," Journal of Micromechanics and Microengineering, Vol. 11, Issue 4, pp. 287-300, 2001   DOI   ScienceOn
5 Kang, E. G., Lee, S. W., Choi, H. Z. and Hong, W. P., "Micro Mold Fabrication Process by Focused Ion Beam using Amorphous Materials," Korea Patent Pending, No. 10-2007-0035048, 2007
6 Takahashi, M., "Micro/Nano Hot Embossing of Quartz Glass Materials with Glassy Carbon Mold Prepared by Focused Ion Beam," The KITECH-AIST Joint Workshop on Micro/Nano Fabrication Technology, pp.19-44, 2007
7 Choi, H. Z., Hong, W. P., Kang, E. G., Choi, B. Y. and Lee, S. W., "Analysis on FIB-Sputtering Process using Taguchi Method," Transctions of the Korean Society of Machine Tool Engineers, Vol.15, No.6, pp.72-75, 2006   과학기술학회마을
8 Youn, S. W., Takahashi, M., Goto, H. and Maeda, R., "Microstructuring of glassy carbon mold for glass embossing - Comparison of focused ion beam, nano/femtosecond-pulsed laser and mechanical machining," Microelectronic Engineering, Vol. 83, pp.2482-2492, 2006   DOI   ScienceOn
9 Lee, S. W., Kang, E. G., Choi, B. Y., Hong, W. P. and Choi, H. Z., "Analysis of FIB-Sputtering Characteristicson Glassy Carbon," Korean Society for Precision Engineering Spring Conference, pp.767-768, 2007
10 Kang, E. G., Choi, B. Y., Hong, W. P., Lee, S. W. and Choi, H. Z., "Nano-Patterning Characteristics using FIB-Sputtering Technology for DVD Mold," J. of the KITECH, Vol. 16, No. 7, pp.158-169, 2007