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A Control Strategy for Systems with Single Flexible Mode to Reduce Residual Vibration  

Shin, Young-Joo (삼성전자 반도체총괄 메모리사업부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.24, no.11, 2007 , pp. 91-100 More about this Journal
Abstract
Many manufacturing devices must execute motions as quickly as possible to achieve profitable high-volume production. Most of them have devices having flexibility and a time delay of one sampling is added to the plants when they are controlled by fast discrete controllers, which brings about non-minimum phase zeros. This paper develops a control strategy that combines feedforward and feedback control with command shaping for such devices. First, the feedback controller is designed to increase damping and eliminate steady-state error. Next, the feedforward controller is designed to speed up the transient response. Finally, an appropriate reference profile is generated using command-shaping techniques to ensure fast point-to-point motions with minimum residual vibration. The particular focus of the paper is to understand the interactions between these individual control components. The resulting control strategy is demonstrated on a model of a high-speed semiconductor manufacturing machine.
Keywords
Residual vibration; Flexible mode; Command shaping; Motion control; Feedfurward control;
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