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Fabrication of Ni Stamper based on Micro-Pyramid Structures for High Uniformity Light Guide Panel (LGP)  

Kim, Seong-Kon (한국기계연구원, 나노공정장비연구센터)
Yoo, Yeong-Eun (한국기계연구원, 나노공정장비연구센터)
Seo, Young-Ho (한국기계연구원, 나노공정장비연구센터)
Jae, Tae-Jin (한국기계연구원, 나노공정장비연구센터)
Whang, Kyung-Hyun (한국기계연구원, 나노공정장비연구센터)
Choi, Doo-Sun (한국기계연구원, 나노공정장비연구센터)
Publication Information
Journal of the Korean Society for Precision Engineering / v.23, no.9, 2006 , pp. 174-178 More about this Journal
Abstract
Pyramid shape of micro pattern is applied to the light guide panel (LGP) to enhance the uniformity of the brightness of the LCD. The micro pyramids are molded in intaglio on the surface of the LGP. The size of each pyramid is 5$\mu$m $\times$ 5$\mu$m on bottom and the height is about 3.5$\mu$m. The pyramids are distributed on the LGP surface randomly to be sparser where the light comes in and denser at the opposite side as a result of a simulation using lightools$^{TM}$ Based on this design, a silicon pattern master and a nickel stamper are fabricated by MEMS process and electro plating process. Intaglio micro pyramids are fabricated on the 6' of silicon wafer from the anisotropic etching using KOH and the process time, temperature of the KOH solution, etc are optimized to obtain precise shape of the pattern. A Wi stamper is fabricated from this pattern master by electro plating process and the embossed pyramid patterns turns out to be well defined on the stamper. Adopting this stamper to the mold base with two cavities, 1.8' and 3.6' LGPs are injection molded.
Keywords
Liquid crystal displays(LCD); Light guide panel(LGP); Nickel stamper; MEMS; Electro plating; Injection molding;
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