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A Laser-Applied Hybrid Focus Method for the Measurement of a Surface Morphology with Depth Discontinuity  

Kim, Gyung-Bum (충주대학교 항공.기계설계학과)
Shin, Young-Su ((주) 인텍플러스)
Moon, Soon-Hwan (주성대학 테크노정보과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.23, no.9, 2006 , pp. 111-118 More about this Journal
Abstract
A hybrid focus method with multiple laser slits is newly proposed for the measurement of surface morphology with depth discontinuity, and it is based on the integration of DFB and DFF. Rough depth information is estimated through calibration tables which are constructed by DFD with multiple laser slits, and then DFF is applied to only each specific depth range using the rough depth information resulting from DFD. The proposed hybrid method gives more accurate results than DFD and DFF, and faster measurement than DFF in the vicinity of depth discontinuity Its performance is verified through experiments of calibration blocks with sharp depth discontinuity.
Keywords
DFD; DFF; Focus measure; Laser-applied hybrid focus method; Multiple laser slits;
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Times Cited By KSCI : 4  (Citation Analysis)
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