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The Effect of Injection Angle and Pressure on Etch of Invar Plate Using Industrial Etch-Nozzle  

Jeong Heung-Cheol (부산대학교 기계공학과, 기계기술연구소)
Kim Dong-Wook (부산대학교 기계공학과, 기계기술연구소)
Choi Gyung-Min (부산대학교 기계공학부, 기계기술연구소)
Kim Duck-Jool (부산대학교 기계공학부, 기계기술연구소)
Publication Information
Journal of the Korean Society for Precision Engineering / v.23, no.8, 2006 , pp. 47-53 More about this Journal
Abstract
The purpose of this study was to investigate the significant characteristics in spray of industrial etch-nozzle for the design of process. The experiment was carried out with different spray pressure and industrial nozzle in wet etch. The characteristics of liquid spray, such as axial velocity and sauter mean diameter measurements were obtained by PDA. And impact force was calculated from spray characteristics. It was found that the fluid with higher spray pressure resulted in the smaller SMD and the higher droplet velocity and impact force. The depth of etch was increased in case of high spray pressure. In the case of injection angle oscillated between $20^{\circ}$, the result indicated constant effect of etch. The correlation between the spray characteristics and etch ones were analyzed. The depth of etch had good positive correlation with axial velocity and impact force. The result clearly shows that the characteristics in wet etch are strongly related to the spray characteristics with process.
Keywords
Spray pressure; Impact Force; PDA; Injection Angle; Depth of Etch; Spray Characteristics;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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1 Go, S. G., Go, Y. H. and An, B. J., 'Representation of Data,' Statistical Quality Control, Part 2, pp. 14-17, 2000.
2 Choi, Y. C., Jung. J. W. and Kim D. J., ？'Characteristics of Spray from Pressure-Swirl Nozzle with Different Liquid Properties and Nozzle Geometries,' Transactions of the KSME, B, Vol. 25, No. 12, pp. 1813-1820, 2001   과학기술학회마을
3 Allen, D. M., 'The Principles and Practice of Photochemical Machining and Photoetching,' Adam Hilger, Bristol and Boston, 1986
4 Visser, A. and Buhlert, M., 'Theoretical and Practical Aspects of the Miniaturization of Lead Frames by Double Sided Asymmetrical Spray Etching,' Journal of Materials Processing Technology, Vol. 115, pp. 108-113, 2001   DOI   ScienceOn
5 Won, S. T. and Kim, J. H., 'The Effects of the Annealing Heat Treatments and Testing Temperatures on the Mechanical Properties of the Invar Materials,' Journal of the KSPE, Vol. 18, No. 12, pp. 167-176, 2001   과학기술학회마을
6 Shrimpton, J. S. and Yule, A. J., 'Drop Size and Velocity Measurement in an Electrostatic Producted Hydrocarbon Spray,' ASME Journal of Fluids Engineering, Vol. 120, pp. 580-585, 1998   DOI   ScienceOn
7 Jeong, H. C., Choi, G. M. and Kim, D. J., 'The Prediction of Etching Characteristics Using Monte-Carlo Simulation in Etching Process of Lead-Frame,' Journal of KSPE, Vol. 23, No.1, pp. 72-79, 2006   과학기술학회마을
8 Jung, J. W., Cha, K. J. and Kim, D. J., 'Characteristics of the Droplet Behavior in the Overlap Region of Twin Spray and in Single Spray,' Transactions of the KSME, B, Vol. 24, No. 10, pp. 1300-1308, 2000
9 Abate, K., 'Photochemical Etching of metals,' Metal Finishing, Vol. 98, No.6, pp. 414-417, 2000   DOI   ScienceOn
10 Sundaram, K. B., Sah, R. E., Baumann, H., Balachandran, K. and Todi, R. M., 'Wet Etching Studies of Silicon Nitride Thin Films Deposited by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition,' Microelectronic engineering, Vol. 70, pp. 109-114, 2003   DOI   ScienceOn
11 Kim, W. M., Baek, S. Y., Lee, E. S. and Tak, Y. S., 'A study of Pulse EMM for Invar alloy,' Proceedings of the KSPE Conference, pp. 560-563, 2004.   과학기술학회마을