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Contact Detection Algorithm of the Z-axis of a Wire Bonder  

Kim Jung-Han (서울산업대학교 기계설계자동화공학부 정밀기계기술연구소)
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Abstract
A new design of contact detection algorithm is proposed for the z-axis of a wire bonder that interconnects between pads and leads in semiconductor manufacturing processes. Fast and stable contact detection of the z-axis is extremely important fer maintaining proper quality in the fine pitch gold wire bonding process, which has a small pad size of below 70um. The new method is based on a statistical approach and designed for the discrete Kalman filter. Real wire bonding experimental results are presented to demonstrate the advantages of the proposed algorithm.
Keywords
Detection algorithms; Stochastic parameters; Kalman filters; Filtering problem;
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Times Cited By KSCI : 2  (Citation Analysis)
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1 Leonhardt, D. A., 'Fine pitch packaging: Trends and technology,' Semicon west, 1997
2 Blair, W. D., 'Fixed-gain two stage estimators for tracking maneuvering targets,' IEEE transactions on aerospace and electronic system, Vol-29, pp 1004-1014,1993   DOI   ScienceOn
3 Bogler, P. L., 'Tracking a maneuvering target using input estimation,' IEEE transaction on aerospace and electronic systems, AES-23, pp298-310, 1987   DOI   ScienceOn
4 Kim, J.H. and Oh, J.H., 'A land vehicle tracking algorithm using stand-alone GPS,' Control Engineering Practice, 8, pp 1189-1196, 2000   DOI   ScienceOn
5 Kailath, T., 'An innovation approach to least squares estimation part I: Linear filtering in additive white noise,' IEEE Transaction on Automatic control, AC-13, pp.646-660, 1968
6 Harvey, A.C., 'Time Series Models,' second edition, the MIT press, 1992
7 Hwang, D.Y., Jeon, S.J. and Kim, K.B., 'Development of the Flip-Chip Bonder using multi-DOF motion stage and vision system,' Proc. of KSPE, pp.1717-1722, 2003   과학기술학회마을
8 Kwon, K.H., Oh, S.H., Cho, N.G .. and Yoon, J.Y., 'Development of small loading and positioning device using VCM,' Journal of KSPE, Vol. 20, No.12, pp.64-72, 2003   과학기술학회마을