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Fabrication of Precise Patterns using a Laser Beam Expanding Technique in Nano-Replication Printing (nRP) Process  

Park Sang Hu (한국과학기술원 기계공학과 대학원)
Lim Tae Woo (한국과학기술원 기계공학과 대학원)
Yang Dong-Yol (한국과학기술원 기계공학과)
Yi Shin Wook (한국과학기술원 물리학과 대학원)
Kong Hong Jin (한국과학기술원 물리학과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.22, no.1, 2005 , pp. 175-182 More about this Journal
Abstract
A laser beam expanding technique is employed to fabricate precise nano-patterns in a nano-replication printing (nRP) process. In the nRP process, some patterns can be fabricated in the range of several microns inside on a polymerizable resin by using a volume-pixel (voxel) matrix that is transformed from a two-tone bitmap figure file. The liquid monomers are polymerized by means of a two-photon-absorption (TPA) phenomenon that is induced by a femtosecond (fs)-pulse laser. The yokels are generated consecutively to merge into adjoining yokels in the process of fabricating a pattern. The resolution of a fabricated pattern can be obtained under the diffraction limit of a laser beam by the two-photon absorbed polymerization (TPP). In this work, a beam-expanding technique has been applied to enlarge a working area and to fabricate precise patterns. Through this work, a working area is expanded by the technique as much as 2.5 times compared with a case of without a beam expanding technique, and precision of outside patterns is improved.
Keywords
Nano Replication Printing Process (nRP); Two-photon absorbed Polymerization; Femtosecond Laser; Beam Expansion;
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Times Cited By KSCI : 5  (Citation Analysis)
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