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Electrostatic Suspension System of Silicon Wafer using Relay Feedback Control  

Lee, Sang-Uk (울산대학교 대학원 기계자동차공학과)
Jeon, Jong-Up (울산대학교 기계자동차공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.22, no.10, 2005 , pp. 56-64 More about this Journal
Abstract
A simple and cost-effective method for the electrostatic suspension of thin plates like silicon wafers is proposed which is based on a switched voltage control scheme. It operates according to a relay feedback control and deploys only a single high-voltage power supply that can deliver a DC voltage of positive and/or negative polarity. This method possesses the unique feature that no high-voltage amplifiers are needed which leads to a remarkable system simplification relative to conventional methods. It is shown that despite the inherent limit cycle property of the relay feedback based control, an excellent performance in vibration suppression is attained due to the presence of a relatively large squeeze film damping origination from the air between the electrodes and levitated object. Using this scheme, a 4-inch silicon wafer was levitated stably with airgap variation decreasing down to $1 {\mu}m$ at an airgap of $100{\mu}m$.
Keywords
Electrostatic suspension; Silicon wafer; Relay control; Squeeze film effect;
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Times Cited By KSCI : 1  (Citation Analysis)
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