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High Precision Measurement of Rotational Accuracy  

Wei Gao (일본 Tohoku대학 공학연구과 나노메카닉스 전공)
Publication Information
Journal of the Korean Society for Precision Engineering / v.21, no.8, 2004 , pp. 7-13 More about this Journal
Keywords
Rotational accuracy; Precision nano measurement; Error Seperation; Multi-step method; Multi-probe method;
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  • Reference
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