Development of Contour Offset Algorithm(COA) in nRP Process for Fabricating Nano-precision Features
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임태우
(한국과학기술원 기계공학과 대학원)
박상후 (한국과학기술원 기계공학과 대학) 양동열 (한국과학기술원 기계공학) 이신욱 (한국과학기술원 물리학과 대학) 공홍진 (한국과학기술원 물리학과) |
1 | Sun, S.B., Maeda, M., Takada, K., Chon, J.W.M., Gu, M., Kawata, S., 'Experimental investigation of single voxels for laser nanofabrication via two-photon photopolymerization,' Vol.83, No.5, pp.819-821, 2003 DOI ScienceOn |
2 | Kong, H.J., Yi, S.W., Lee, S.K., Yang, D.Y., Park, S.H., Lim, T.W., '3-dimensional micro-fabrication using two-photon absorption by femtosecond laser,' Proc. of SPIE, Vol.5342, pp.137-145, 2004 DOI |
3 | Sun, H.B., Tanaka, T., Kawata, S., 'Three-dimensional focal spots related to two-photon excitation,' App. Physics letters, Vol.80, No.20, pp.3673-3675, 2002 DOI ScienceOn |
4 | Serbin, J., Egbert, A., Ostendorf, A., Chichkov, B.N., 'Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,' Optics letters, Vol.28, No.5, pp.301-303, 2003 DOI ScienceOn |
5 | Kaneko, K., Sun, H.B., Duan, X .M., Kawata, S., 'Submicron diamond-lattice photonic crystals produced by two-photon laser nanofabrication,' Appl. Phys. Letters, Vol.83, No.11, 2003 DOI |
6 | Park, S.H., Lim, T.W., Yang, D.Y., Yi, S.W., Kong, H.J., 'Development of a nano replication printing(nRP) process using a voxel matrix scanning scheme,' The KSPE Autumn Meeting, pp.424-427, 2003 |
7 | Kawata, S., Sun, H.B., Tanaka, T., Takada, K., 'Finer features for functional microdevices,' Nature, Vol.412, No.16, pp.697-698, 2001 DOI ScienceOn |
8 | Yi, S.W., Lee, S.K., Kong, H.J., Park, S.H., Jeong, C.G., Lim, T.W., Yang, D.Y., 'Three-dimensional microfabrication with nano resolution using two-photon absorption of femto-second laser,' Optical Society of Korea Summer Meeting, pp.64-65, 2003 과학기술학회마을 |
9 | Yang, D.Y., Sohn, H.K., 'Principles of recent rapid prototyping processes,' J. of the KSME, Vol.39, No.9, pp.28-31, 2000 |
10 | Maruo, S., Kawata, S., 'Two-photon-absorbed nearinfrared photopolymerization for three-dimensional microfabrication,' J. of Microelectromechanical Systems, Vol.7, No.4, pp.411-415, 1998 DOI ScienceOn |
11 | Sun, H.B., Takada, K., Kawata, S., 'Elastic force analysis of functional polymer submicron oscillators,' Appl. Phys. Letters, Vol.79, No.19, 2001 DOI ScienceOn |
12 | Chou, S.Y., Keimel, C., Gu, J., 'Ultrafast and direct imprint of nanostructures in silicon,' Nature, Vol.417, No.20, pp.835-837, 2002 DOI ScienceOn |
13 | Xia, Y. Whitesides, G.M., 'Soft lithography,' Angew. Chem. Int. Ed., Vol.37, pp.550-575, 1998 DOI ScienceOn |
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