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Trend of Nanoimprint Lithography Technology  

정준호 (한국기계연구원 지능형정밀기계연구부)
신영재 (한국기계연구원 지능형정밀기계연구부)
이응숙 (한국기계연구원 지능형정밀기계연구부)
황경현 (한국기계연구원)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.3, 2003 , pp. 15-22 More about this Journal
Keywords
Nanoimprint lithography; Nanofabrication; Nanost.ucture; Nanomanufacturing;
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