Browse > Article

Double Electro-Magnetic Force Compensation Method for the Micro Force Measurement  

최임묵 (한국표준과학연구원)
우삼용 (한국표준과학연구원)
김부식 (한국표준과학연구원)
김수현 (한국과학기술원)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.2, 2003 , pp. 104-111 More about this Journal
Abstract
Micro force measurement is required more frequently for a precision manufacturing and investment in fields of precision industries such as semiconductor, chemistry and biology, and so forth. Null balance method has been introduced as an alternative of a loadcell. Loadcells have advantages in aspects of low cost and easy manufacturing, but have also the limitation in resolution and sensitivity to environment variations. In this paper, null balance method is explained and the dominant parameters related to system performances are mentioned. Null position sensor, electromagnetic system and controller are investigated. Also, the characteristic experiment is carried out in order to estimate the resolution and the measurement range. In order to overcome the limitation by the drift of position sensor and the performance of controller, double electromagnetic force compensation method is proposed and experimented. After controlling and filtering, the resolution under $\pm$ 1mg and measurement range over 300g could be obtained.
Keywords
Force Measurement; Loadcell; Null balance method; Electro-magnetic force compensation; Resolution;
Citations & Related Records
연도 인용수 순위
  • Reference
1 A. Cheshmehdoost and B.E.Jones, 'Design and Performance characteristics of an integrated high capacity DETF-based force sensor,' The 8th Int. Conf. on Solid-state Sensors and Actuators and Eurosensors IX. Stockholm, Sweden, June25-29 pp. 608-611, 1995
2 I. R. Peterson, 'Design considerations for an eiectrobalance microforce sensor,' Rev. Sci. Instrum. Vol. 68, No. 2, pp. 1130-1136, 1997   DOI   ScienceOn
3 T.J.Quinn, 'The beam balance as an instrument for very precise weighing,' Meas. Sci. Technol. Vol. 3, pp. 141-159, 1992   DOI   ScienceOn
4 S. Hara, S. Kasai, T. Nishitani and A. Nagashima, 'Development of steady-state magnetic sensor,' Rev. of Sci. Instrum. Vol.70, No.l, pp435-438, 1999   DOI   ScienceOn
5 Shigeru Kurosu, 'Perfomance of gyroscopic force measuring apparatus,' Proc. of the Measurement of Force and Mass, pp. 129-134, 1996
6 Alexander Kusko and Thedore Wrovlewski, 'Computer-Aided Design of Magnetic Circuits,' The MIT Press
7 Robert K. Butler, Vittal S. Rao, Leslie R. Koval, 'Controller implementation on infinite order structural systems using distributed sensors,' SPIE Proc. 2190, pp. 358-368, 1994
8 Finn Gronlund, 'Synthesis of feedback control unit for beam balance,' Phys. E:Sci. Instrm. Vol. 22, pp. 899-903, 1989   DOI   ScienceOn
9 W.Balachandran, M.Halimic, M.Hodzic, M.Tariq, Y.Enab and F.Cecelja, 'Optimal Digital Control and Filtering for Dynamic Weighing System,' IEEE Instrumentation/ Measurement Technology Conf. -IMTC/95, Waltham, Boston, MA, USA, April 24- 26, pp. 293-298, 1995   DOI