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Distortion of the Bottom Surface in Micro Cavity Machining Using MEDM  

임종훈 (서울대학교 대학원 기계공공학부)
류시형 (서울대학교 정밀기계설계공동연구소)
제성욱 (서울대학교 대학원 기계공공학부)
주종남 (서울대학교 기계항공공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.12, 2003 , pp. 191-197 More about this Journal
Abstract
As mechanical components are miniaturized, the demand on micro die and mold is increasing. Micro mechanical components usually have high hardness and good conductivity. So micro electrical discharge machining (MEDM) is an effective way to machine those components. In micro cavity fabrication using MEDM, it is observed that the bottom surface of cavity is distorted. Electric charges tend to be concentrated at the sharp edge. At the center of the bottom surface, debris can not be drawn off easily. These two phenomena make the bottom surface of the electrode and workpiece distort. As machining depth increases, the distorted shape of electrode approaches hemisphere. This process is affected by capacitance and the size of electrode. By using a smaller electrode than the desired cavity size and appropriate tool movement, bottom shape distortion can be prevented.
Keywords
Micro cavity; Electrical discharge machining; Bottom surface distortion; Debris; Electrode wear;
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