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Development of Design Software for MEMS integrating Commercial Codes: DS/MEMS  

허재성 (한국과학기술원 기계공학과)
이상훈 (한국과학기술원 기계공학과)
곽병만 (한국과학기술원 기계공학과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.11, 2003 , pp. 180-187 More about this Journal
Abstract
A CAD-based seamless design system for MEMS named DS/MEMS was developed which performs coupled-field analysis, optimal and robust design. DS/MEMS has been developed by means of integrating commercial codes and inhouse code-SolidWorks, FEMAP, ANSYS and CA/MEMS. This strategy results in versatility that means to include various analysis model, corresponding analyses and approximated design sensitivity analysis and user friendliness that design variables are taken to be selectable directly from a CAD model, that the problem is formulated under a window environment and that the manual job during optimization process is almost eliminated. DS/MEMS works on a parametric CAD platform, integrating CAD modeling, analysis, and optimization. Nonlinear programming algorithms, the Taguchi method, and response surface method are made available for optimization. One application problem is taken to illustrate the proposed methodology and show the feasibility of DS/MEMS as a practical tool.
Keywords
MEMS; Optimal design; Robust design; Parametric; CAD; Integration and connection;
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