Browse > Article

Atmospheric Pressure Plasma Applications to Treat Off-Gases from Semiconductor Manufacturing  

Song, Young-Hoon (한국기계연구원 환경기계기술연구부)
Kim, Yong-Jin (한국기계연구원 환경기계기술연구부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.19, no.8, 2002 , pp. 34-37 More about this Journal
Keywords
Off-Gas Treatment; PFCs; VOCs; atmospheric pressure plasma;
Citations & Related Records
연도 인용수 순위
  • Reference
1 SEMATECH Technology Transfer 95062847A-ENG
2 SEMATECH Technology Transfer 97023244A-ENG
3 S. Raoux et al., 'Remote Microwave Plasma Source for Cleaning Chemical Vapor Deposition Chambers: Technology for Reducing Global Warming Gas Emissions,' J. Vac. Sci. Technol. B 17(2), pp. 477-485   DOI   ScienceOn
4 Yong-Ho Kim, Sang Hee Hong, Min Suk Cha, Young-Hoon Song, Seock-Joon Kim, 'Measurements of Electron Energy by Emission Spectroscopty in Pulsed Corona and Dielectric Barrier Discharge, Proceedings of The 3rd Int'l Symposium on Nonthermal Plasma Technology for Pollution control,' Cheju, Korea, April, 23-27, 2001
5 Yong C. Hong, Jeong H. Kim, Han S. Uhm, 'Reduction of Perfluorocompound Emissions by Microwave Plasma Torch', Proceedings of the 6th Asia Pacific Conference on Plasma Science and Technology, Jeju, July 1-4, 2002
6 T. Yamamoto, et al., 'NF$_3$ Treatment by Ferroelectric Packed-Bed Plasma Reactor, Proceedings of The 2nd Int'l Symposium on Non-thermal Plasma Technology for Pollution control,' Salvador, Brazil, August, 11-15, 1997