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Principal and Applications of Nanoindentation Test  

Han, Jun-Hui (Korea Reserch Institute of Standards and Science)
Lee, Gwang-Ryeol (Thin Film Techmology Center, KIST, SEOUL)
Kim, Gwang-Seok (Dept. of Aviation Materials Engineering, Hankuk Aviation University)
Lee, Sang-Yul (Dept. of Aviation Materials Engineering, Hankuk Aviation University)
Publication Information
Journal of the Korean Society for Precision Engineering / v.19, no.3, 2002 , pp. 19-26 More about this Journal
Keywords
DLC; Polyimide; MEMS; Nanoidetation; Thin film; Hardness; Elastic modulus;
Citations & Related Records
Times Cited By KSCI : 7  (Citation Analysis)
연도 인용수 순위
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