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Nanotribology - Prospects and Applications in Ultra-precision Micro-systems  

Kim, Dae-Eun (Dept.of Mechanical Electronics Engineering, Yonsei University)
Sung, In-Ha (Dept.of Mechanical Engineering, Graduate School of Yonsei University)
Chung, Koo-Hyun (Dept.of Mechanical Engineering, Graduate School of Yonsei University)
Publication Information
Journal of the Korean Society for Precision Engineering / v.19, no.1, 2002 , pp. 33-42 More about this Journal
Keywords
Nanotribology; Scanning Probe Microscopy; Molecular Dynamic Simulation; Mechano-chemical micro-machining;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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1 Komvopoulos, K., 'Surface Engineering and Microtribology for Microelectromechanical Systems,' Wear, Vol. 200, pp. 305-327, 1996   DOI   ScienceOn
2 Maboudian, R., 'Surface Processes in MEMS Technology,' Surf. Sci. Rep., Vol. 30, pp. 207-269, 1998   DOI   ScienceOn
3 Dake, L. S., Russell, J. A., and Debrodt, D.C., 'A Review of DOE ECT Tribology Surveys,' J. Tribol. -T. ASME, Vol. 108, pp. 497-501, 1986   DOI
4 Bhushan, B., 'Nanoscale Tribophysics and Tribomechanics,' Wear, Vol. 225, pp. 465-492, 1999   DOI   ScienceOn
5 Kaneko, R., Miyamoto, T., Ando, Y., and Hamada, E., 'Microwear,' Thin Solid Films, Vol. 273, pp. 105-111, 1996   DOI   ScienceOn
6 Robbins, M. O., Smith, E. D., 'Connecting Molecular-scale and Macroscopic Tribology,' Langmuir, Vol. 12, pp. 4543-4547, 1996   DOI   ScienceOn
7 Johnson, K. L., 'Mechanics of Adhesion,' Tribol. Int., Vol. 31, No. 8, pp. 413-418, 1998   DOI   ScienceOn
8 Hwang, D. H., Sung, I. H., Kim, D. E., and Lee, S. J., 'Effects of Material Pair Properties on the Frictional Behavior of Metals,' Wear, Vol. 225, pp. 600-614, 1999   DOI   ScienceOn
9 Oktay, S. T., Suh, N. P., 'Wear Debris Formation and Agglomeration,' J. Tribol.-T. ASME, Vol. 114, pp. 379-393, 1992   DOI
10 Capella, B., Dietler, G., 'Force-distance Curves by Atomic Force Microscopy,' Surf. Sci. Rep., Vol. 34, pp. 1-104, 1999   DOI   ScienceOn
11 Muller, T., Lohrmann, M., Kasser, T., Marti, O., Mlynek, J., and Krausch, G., 'Frictional Force between an Sharp Asperity and a Surface Step,' Phys. Rev. Lett., Vol. 79, No. 25, pp. 5066-5069, 1997   DOI   ScienceOn
12 Kim, D. E., Suh, N. P., 'Molecular Dynamics Investigation of Two-Dimensional Atomic-Scale Friction,' J. Tribol.-T. ASME, Vol. 116, pp. 225-231, 1994   DOI   ScienceOn
13 정구현, 이성창, 김대은, '분자정역학 기법을 이용한 초미세 절삭특성에 관한 고찰,' 한국정밀공학회지, 제 14 권, 제 3호, pp. 122-129, 1997   과학기술학회마을
14 Sundararajan, S., Bhushan, B., 'Topography-induced Contributions to Frictional Forces Measured Using an Atomic Force Microscope,' J. Appl. Phys., Vol. 88, No. 8, pp. 4825-4831, 2000   DOI   ScienceOn
15 Guntherodt, H. J., 'Friction force microscopy,' in Forces in Scanning Probe Methods, pp. 285-306, Kluwer Academic Publishers, 1995
16 Sung, I. H., Lee, H. S., and Kim, D. E., 'Effect of Surface Topography on the Frictional Behavior at Micro/Nano-scale,' 3rd International Colloquium Micro-Tribology, Poland, 2001, (Wear, Submitted)
17 Cha, K. H., Chung, K. H., and Kim, D. E., 'Effect of Slider Load on the Wear Debris Contamination Tendency of Head/Slider,' IEEE T. Magn., Vol. 35, No. 5, pp. 2355-2357, 1999   DOI   ScienceOn
18 Ikawa, N., Shimada, S., Tanaka, H., and Ohmori, G., 'Atomistic Analysis of Nanometric Chip Removal as Affected by Tool-Work Interaction in Diamond Turning,' Ann. CIRP, Vol. 40, pp. 551-554, 1991   DOI   ScienceOn
19 Cha, K. H., Kim, D. E., 'Tribological Properties of Micro-Undulated Silicon Under Light Load,' International Tribology Conference, Nagasaki, Japan, pp. 296, 2000
20 Tian, H., Suh, N. P., and Saka, N., 'Boundary Lubrication Studies on Undulated Titanium Surfaces,' Tribol. T., Vol. 32, pp. 289-296, 1989   DOI   ScienceOn
21 Maekawa, K., 'Friction and Tool Wear in Nano-scale Machining- A Molecular Dynamics Approach,' Wear, Vol. 188, pp. 115-122, 1995   DOI   ScienceOn
22 Zhang, L., Tanaka, H., 'Towards a Deeper Understanding of Friction and Wear on the Atomic Scale: A Molecular Dynamics Analysis,' Wear, Vol. 211, pp. 44-53, 1997   DOI   ScienceOn
23 Rabinowicz, E., Friction and Wear of Materials, John Wiley & Sons, 1995
24 Wienss, A., Persch-Schuy, G., Vogelgesang, M., and Hartmann, U., 'Scratching Resistance of Diamond-Like Carbon Coatings in the Subnanometer Regime,' Appl. Phys. Lett., Vol. 75, No. 8, pp. 1077-1079, 1999   DOI
25 Deng, K., Collins, R. J., Mehregany, M., and Sukenik, C. N., 'Performance Impact of Monolayer Coating of Polysilicon Micromotors,' J. Electochem. Soc., Vol. 142, pp. 1278-1285, 1995   DOI
26 Kim, D. E., Suh, N. P., 'Decoupled Design of Cylinder Liner for IC Engines,' SAE Paper, No.911231, pp. 99-106, 1992
27 Suh, N. P., Saka, N., 'Surface Engineering,' Ann. CIRP, Vol. 36, pp. 403-408, 1987   DOI   ScienceOn
28 Srinivasan, U., Houston, M. R., and Howe, R. T., 'Alkyltrichlorosilane-Based Self-Assembled Monolayer Films for Stiction Reduction in Silicon Micro-Machines', J. Microelectromech. S., Vol. 7, pp. 252-260, 1998   DOI   ScienceOn
29 Hwang, D. H., Kim, D. E., and Lee, S. J., 'Influence of Wear Particle Interaction in the Sliding Interface on Friction of Metals,' Wear, Vol. 225, pp. 427-439, 1999   DOI   ScienceOn
30 Cha, K. H., Kim, D. E., 'Investigation of the Tribological Behavior of Octadecyltrichlorosilane Deposited on Silicon,' Wear, Vol. 251, pp. 1169-1176, 2001   DOI   ScienceOn
31 Archard, J. F., 'Contact and Rubbing of Flat Surfaces,' J. Appl. Phys., Vol. 24, pp. 981-988, 1953   DOI
32 Bhushan, B., Koinkar, V. N., 'Nanoindentation Hardness Measurements Using Atomic Force Microscopy,' Appl. Phys. Lett., Vol. 64, No. 13, pp. 1653-1655, 1994   DOI   ScienceOn
33 Kim, D. E., Yi, J. J., 'Micro-patterning of Silicon by Frictional Interaction and Chemical Reaction,' J. Tribol.-T. ASME, Vol. 120, No. 2, pp. 353-357, 1998   DOI   ScienceOn
34 Chung, K. H., Han, D. K., Park, J. W., Lee, S. C., and Kim, D. E., 'Feasible Method for Accelerated Testing of Head-Disk Interface Tribological Behavior,' J. Inf. Stor. Proc. Syst., Vol. 3, pp. 17-26, 2001
35 Knurshudov, A., Kato, K., 'Wear of the Atomic Force Microscope Tip under Light Load, Studied by Atomic Force Microscopy,' Ultramicroscopy, Vol. 60, pp. 11-16, 1995   DOI   ScienceOn
36 Lee, J. M., Jin, W. H., and Kim, D. E., 'Application of Single Asperity Abrasion Process for Surface Micro-machining,' Wear, Vol. 251, pp. 1133-1143, 2001   DOI   ScienceOn
37 Kim, D. E., Park, J. W., Han, D. K., Park, Y. S., Chung, K. H., and Park, N. Y., 'Strategies for Improvement of Tribological Characteristics at the Head/Disk Interface,' IEEE T. Magn., Vol. 37, No. 2, pp. 912-917, 2001   DOI   ScienceOn
38 Lee, J. M., Sung, I. H., and Kim, D. E., 'Process Development of Precision Surface Micro-machining Using Mechanical Abrasion and Chemical Etching,' Microsyst. Technol., 2002, In press   DOI
39 Wendel, M., Kuhn, S., Lorenz, H., Kottahaus, J. P., and Holland, M., 'Nanolithography with an Atomic Force Microscope for Integrated Fabrication of Quantum Electronic Devices,' Appl. Phys. Lett., Vol. 65, No. 14, pp. 1775-1777, 1994   DOI   ScienceOn
40 Sung, I. H., Lee, H. S., and Kim, D. E., 'Influence of Surface Properties on Micro/Nano-Scale Tribological Behavior of Silicon,' Proceedings of the 32nd ISR(International Symposium on Robotics), Seoul, Korea, pp. 1921-1925, 2001