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http://dx.doi.org/10.22156/CS4SMB.2018.8.6.043

Convergence Study on FTO Film Etchant  

Han, Doo-Hee (Industrial Technology Convergence Research Institute, Chungwoon University)
Yang, Ui-Dong (Chungwoon University Dept. of Global Management)
Publication Information
Journal of Convergence for Information Technology / v.8, no.6, 2018 , pp. 43-48 More about this Journal
Abstract
An etchant capable of forming a circuit in an FTO film that can replace ITO, which depends on full imports, was prepared. The etching solution is composed of 1 to 30% by weight of fluoride, 1 to 20% by weight of acid, 0.5 to 5% by weight of surfactant, 5 to 20% by weight of solvent, 0.5 to 10% by weight of corrosion inhibitor and the balance of water. This etchant can be etched using a dry film, thereby reducing the cost, and is free from bubbles and residue of the etchant. The characteristics of the etchant were etched in a time of 2 minute with a 100 nm thick FTO, and the etchant temperature was maintained at $50^{\circ}C$. An undercut of -0.00364% was obtained when put into a 2 minute etching solution. No harmful substances such as Cd, Pb, Hg and Cr components were measured. The use of FTO in Korea where rare earths do not exist can achieve localization and import substitution effect.
Keywords
Etchant; FTO; Film; Display; Conductor;
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Times Cited By KSCI : 3  (Citation Analysis)
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