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http://dx.doi.org/10.5515/KJKIEES.2008.19.2.257

The Characteristic of Passive Elements on Aluminum Nitride Substrate  

Kim, Seung-Yong (Department of Electronic Engineering, Korea Polytechnic University)
Yook, Jong-Min (Opto-electronics Laboratory, Korea Advanced Institute of Science and Technology)
Nam, Choong-Mo (Department of Electronic Engineering, Korea Polytechnic University)
Publication Information
Abstract
In this paper, the key parameters of $CO_2$ laser(focus depth, air blow rate, total laser beam time, number of pulse) are experimented for thru-hole and scribing line on AIN(aluminum nitride) substrate with high thermal conductivity. And, microstrip line & spiral planar inductor are fabricated on AIN substrate using 5 um Cu-plating with self-masking technique. The microstrip line of AIN has 0.1 dB/mm attenuation at 10 GHz and 6 nH spiral planar inductor has 56 maximum quality factor at 1 GHz. Thus, the AIN substrate is promising for GHz applications of high power area.
Keywords
AIN Substrate; Microstrip Line; Spiral Planar Inductor;
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Times Cited By KSCI : 1  (Citation Analysis)
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