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Studies on Fabrication of Novel Micromachined SIR. Bandpass Filter Using DAMLs  

Baek Tae-Jong (Millimeter-wave INnovation Technology Research Center, MINT, Dongguk University)
Ko Baek-Seok (Millimeter-wave INnovation Technology Research Center, MINT, Dongguk University)
Kim Sung-Chan (Millimeter-wave INnovation Technology Research Center, MINT, Dongguk University)
Lim Byeong-Ok (Millimeter-wave INnovation Technology Research Center, MINT, Dongguk University)
An Dan (Millimeter-wave INnovation Technology Research Center, MINT, Dongguk University)
Kim Soon=Koo (Millimeter-wave INnovation Technology Research Center, MINT, Dongguk University)
Shin Dong-Hoon (Millimeter-wave INnovation Technology Research Center, MINT, Dongguk University)
Rhee Jin-Koo (Millimeter-wave INnovation Technology Research Center, MINT, Dongguk University)
Publication Information
The Journal of Korean Institute of Electromagnetic Engineering and Science / v.16, no.7, 2005 , pp. 760-767 More about this Journal
Abstract
In this paper, we proposed a new type SIR bandpass filter using DAMLs. This filter is consisted of 2 layers with MEMS resonator layer and CPW feed line. DAMLs ring resonator is elevated with $10{\mu}m$ height from GaAs substrate. Using MEMS processing, we are able to realize SIR bandpass filter easily. Furthermore it is useful to integrate on conventional MMICs because it has CPW interfaces and ring resonator is isolated from substrate by air-gap. We optimized and measured the results that $S_{21}$ attenuation at rejected band is over 15 dB, insertion loss is inside the limit of 3 dB, and relative bandwidth is about $10\%$ at 60 GHz.
Keywords
MEMS; DAMLs; Bandpass Filter; Ring Resonator; Step Impedance Resonator;
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