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RF MEMS Passives for On-Chip Integration

박은철 (한국과학기술원 전자전산학과)
최윤석 (한국과학기술원 전자전산학과)
윤준보 (한국과학기술원 전자전산학과)
하두영 (한국과학기술원 전자전산학과)
홍성철 (한국과학기술원 전자전산학과)
윤의식 (한국과학기술원 전자전산학과)

Publication Information

The Proceeding of the Korean Institute of Electromagnetic Engineering and Science / v.13, no.2, 2002 , pp. 44-52 More about this Journal

Keywords

VCO; RF IC; RF MEMS;

Citations & Related Records

Reference

1	J.-B. Yoon, B.-I. Kim, Y.-S. Choi, and E. Yoon, '3-D Lithography and Metal Surface Micromachining for RF and Microwave MEMS', IEEE Int. MEMS Conf. Tech. Dis., pp. 673-676, Jan. 2002
2	C.-Y. Chi, Y.-H. Kao, J.-J. Luo, K.-M. Chau, 'The enhanced Q spiral inductors with MEMS technology for RF applications', Conf. Microwave, pp. 1326-1329, 2000
3	J. Hartung, 'Integrated Passive Components in MCM-Si Technology and their Application in RF-Systems', Int. Conf. on Multichip Modufes and Hieh Density Packaging, pp. 256-261,1998
4	D. Har, E. Yoon, and S. Hong, 'A Low-Voltage Actuated Micromachiend Microwave Switch Using Torsion Spriongs and Leverage',IEEE trans. MTT, vol. 48, no. 12, pp. 2540-2545, Dec. 2000 DOI ScienceOn
5	J.-B. Yoon, B.-I. Kim, Y.-S. Choi, and E. Yoon, '3-D Lithography and Metal Surface Micromachining fo' RF and Microwave MEMS', IEEE Int. MEMS Conf. Tech. Die., pp. 673-676, Jan. 2002
6	C. M. Nam, Y.-S. Kwon., 'High-Performance Planar Inductor on Thick Oxidized Porous Silicon (OPS) Substrate', IEEE Microwave and Guided Wave Lett., vol. 7, no. 8, PP. 236-238, Aug. 1997 DOI ScienceOn
7	J.-B. Yoon, C.-H. Han, E. Yoon, and C.-K. Kim, 'Monolithic fabrication of electroplated solenoid inductors using three-dimensional photolithography of a thick photoresist', Jpn. J. Appl Phys., vol. 37, Pt. 1, no. 12B, pp. 7081 7085, Dec. 1998
8	J.-B. Yoon, C.-H. Han, E. Yoon and C.-K. Kim, 'Monolithic Integration of 3-D Electoplated Microstructures of Unlimited Number of Levels Using Planarization with a Sacrificial Metallic Mold (PSMM),' IEEE MEMS '99 Tech . Dig., pp. 624-629, Jan. 1999
9	Y.-S. Choi, J.-B. Yoon, B.-L Kim, Y. Eo, and E. Yoon, 'A High-Performance MEMS Trans-former for Silicon RF ICs', IEEE Int. MEMS Conf. Tech. Dig., pp. 653-656, Jan. 2002
10	L. Fan, R. T. Chen, A. Nespola, and M. C. Wu, 'Universal MEMS Platforms for Passive RF Components: Suspended Inductors and Variable Capacitors', Proc. MEMS '98, 1998
11	J. R. Long, 'Monolithic Transformer for Silicon RF IC Design', IEEE J. SoIid-Siate Circuits, vol. 35, pp. 1368-1382, Sep. 2000 DOI ScienceOn
12	J.-B. Yoon, Y.-S. Choi, B.-I. Kim, Y. Eo, and E. Yoon, 'CMOS-compatible, surface micromachined suspended spiral inductors and their proper model for multi-GHz silicon RF IC's' submitted to IEEE Electron Device Lett.
13	B. Kleveland, et al., 'Exploiting CMOS Reverse Interconnect Scaling in Multigigahertz Amplifier and Oscillator Design', IEEE journal of Solid-State Circuits, vol. 36, no. 10, Oct 2001